Microstructure and mechanical properties of sputter-deposited Ti-Ni alloy thin films

Journal of Engineering Materials and Technology, Transactions of the ASME

Volumn 121, Issue 1, 1999, Pages 2-8

  Ishida, A ^a   Miyazaki, S ^b  

^a NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

^b UNIVERSITY OF TSUKUBA   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

COPPER; ELASTICITY; INTELLIGENT MATERIALS; METALLOGRAPHIC MICROSTRUCTURE; MICROACTUATORS; PALLADIUM; SHAPE MEMORY EFFECT; SPUTTER DEPOSITION; THIN FILMS; TITANIUM ALLOYS;

SUPERELASTICITY;

METALLIC FILMS;

EID: 0002089355     PISSN: 00944289     EISSN: 15288889     Source Type: Journal    
DOI: 10.1115/1.2815996     Document Type: Article

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