Time-resolved measurements of the E-to-H mode transition in electronegative pulse-modulated inductively coupled plasmas

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 24, Issue 6, 2006, Pages 2151-2158

  Edamura, Manabu ^a,b   Benck, Eric C ^a   Wang, Yicheng ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

^b HITACHI LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CARRIER CONCENTRATION; DIFFUSION; FLUORINE; PLASMA COLLISION PROCESSES; PULSE MODULATION;

AFTERGLOW PLASMA; AMBIPOLAR DIFFUSION; INELASTIC COLLISION; SHEATH POTENTIAL;

INDUCTIVELY COUPLED PLASMA;

EID: 33750943826     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2359736     Document Type: Article

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