Decay processes of electrons in the afterglow of high-density CF4, c-C4F8 and CF4-H2 plasmas

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 38, Issue 7 B, 1999, Pages 4383-4388

  Sasaki, Koichi ^a   Kadota, Kiyoshi ^a  

^a NAGOYA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CARRIER CONCENTRATION; ELECTRON DENSITY MEASUREMENT; FLUOROCARBONS; INTERFEROMETERS; MAGNETIC FIELD EFFECTS; MOLECULES; PLASMA SOURCES;

DISSOCIATIVE ELECTION ATTACHMENT; ELECTRON LOSS FREQUENCY; MICROWAVE INTERFEROMETER; NEGATIVE FLUORINE IONS;

PLASMAS;

EID: 0033157660     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.38.4383     Document Type: Article

References (23)

1. H. Ohtake and S. Samukawa: Appl. Phys. Lett. 68 (1996) 2416.
2. M. Shiratani, T. Fukuzawa, K. Eto and Y. Watanabe: Jpn. J. Appl. Phys. 31 (1992) L1791.
3. L. J. Overzet, J. H. Beberman and J. T. Verdeyen: J. Appl. Phys. 66 (1989) 1622.
4. T. Mieno: Jpn. J. Appl. Phys. 33 (1994) 4325.
5. K. Ura, K. Sasaki and K. Kadota: J. Plasma Fusion Res. 72 (1996) 1204.
6. A. Kono, M. Harverlag, G. M. W. Kroesen and F. J. de Hoog: J. Appl. Phys. 70 (1991) 2939.
7. N. Takada, D. Hayashi, K. Sasaki and K. Kadota: Jpn. J. Appl. Phys. 36 (1997) L1702.
8. D. Hayashi, M. Nakamoto, N. Takada, K. Sasaki and K. Kadota: submitted to Jpn. J. Appl. Phys. 38 (1999).
9. K. Sasaki, K. Ura, K. Suzuki and K. Kadota: Jpn. J. Appl. Phys. 36 (1997) 1282.
10. K. P. Shamrai and T. B. Taranov: Plasma Phys. Control. Fusion 36 (1994) 1719.
11. D. Edelson and D. L. Flamm: J. Appl. Phys. 56 (1984) 1522.
12. N. V. Mantzaris, A. Boudouvis and E. Gogolodes: J. Appl. Phys. 77 (1995) 6169.
13. C. Suzuki, K. Sasaki and K. Kadota: J. Vac. Sci. Technol. A 16 (1998) 2222.
14. S. M. Spyrou, I. Sauers and L. G. Christophorou: J. Chem. Phys. 78 (1983) 7200.
15. C. Suzuki, K. Sasaki and K. Kadota: J. Appl. Phys. 82 (1997) 5321.
16. S. R. Hunter and L. G. Christophorou: J. Chem. Phys. 80 (1984) 6150.
17. W. W. Stoffels, E. Stoffels and K. Tachibana: J. Vac. Sci. Technol. A 16 (1998) 87.
18. Y. Ohya, S. Hirose, A. Kono and T. Goto: Ext. Abstr. (58th Autumn Meet., 1997) Japan Society of Applied Physics, 4p-B-12 [in Japanese].
19. K. Sasaki, Y. Kawai, C. Suzuki and K. Kadota: J. Appl. Phys. 83 (1998) 7482.
20. Y. Hikosaka and H. Sugai: Jpn. J. Appl. Phys. 32 (1993) 3040.
21. K. Maruyama, K. Ohkouchi and T. Goto: Jpn. J. Appl. Phys. 35 (1996) 4088.
22. K. Usui, K. Sasaki, C. Suzuki and K. Kadota: to be published in Jpn. J. Appl. Phys. 38 (1999) 4373.
23. K. Sasaki, H. Furukawa, C. Suzuki and K. Kadota: to be published in Jpn. J. Appl. Phys. 38 (1999) Pt. 2, 8B.