Optical emission diagnostics for contact etching in Applied Materials Centura HDP 5300 etcher

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 14, Issue 3, 1996, Pages 1137-1141

  Guinn, Keith ^a   Tokashiki, K ^b   McNevin, S C ^a   Cerullo, M ^a  

^a LUCENT TECHNOLOGIES   (United States)

^b NEC CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0141793597     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.580283     Document Type: Article

References (12)

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