Negative ion extraction from pulsed discharges

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 36, Issue 4 SUPPL. B, 1997, Pages 2443-2449

  Overzet, Lawrence J ^a   Smith, Brian A ^a   Kleber, Jennifer ^a   Kanakasabapathy, Sivananda K ^a  

^a UNIVERSITY OF TEXAS AT DALLAS   (United States)

Author keywords

Capacitively coupled plasma; Electron density; Electron energy distribution function; Inductively coupled plasma; Mass spectrometer; Negative ions; Pulsed discharges

Indexed keywords

ANIONS; ION EXTRACTION;

CARRIER CONCENTRATION; ELECTRIC DISCHARGES; ELECTRONS; MASS SPECTROMETERS; PLASMA SHEATHS;

ION SOURCES;

EID: 0031120592     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.36.2443     Document Type: Review

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