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Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films

Volumn 20, Issue 2, 2002, Pages 467-478

Two-dimensional pulsed-plasma simulation of a chlorine discharge

(2) Ramamurthi, Badri a Economou, Demetre J a

a University of Houston (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CARRIER CONCENTRATION; CHLORINE; COMPUTER SIMULATION; ELECTRIC FIELDS; INDUCTIVELY COUPLED PLASMA; MATHEMATICAL MODELS; MAXWELL EQUATIONS; NEGATIVE IONS;

SPATIOTEMPORAL DYNAMICS;

CONTINUUM MECHANICS;

EID: 0036494005 PISSN: 07342101 EISSN: None Source Type: Journal
DOI: 10.1116/1.1450581 Document Type: Article

Times cited : (51)

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