메뉴 건너뛰기




Volumn 111, Issue 5, 2006, Pages 373-384

Form-profiling of optics using the geometry measuring machine and the M-48 CMM at NIST

Author keywords

Asphere and free form optics; Form profilometry; Optical calibration metrology; Surface metrology

Indexed keywords

ASPHERICS; CALIBRATION; ERROR ANALYSIS; MIRRORS; PROFILOMETRY; SURFACE PROPERTIES;

EID: 33750168790     PISSN: 1044677X     EISSN: 1044677X     Source Type: Journal    
DOI: 10.6028/jres.111.027     Document Type: Article
Times cited : (12)

References (23)
  • 1
    • 0032660619 scopus 로고    scopus 로고
    • Stitching interferometery: How and why it works
    • Optical Fabrication and Testing, R. Geyl, J. Maxwell, eds.
    • M. Bray, Stitching interferometery: How and why it works, Proc. SPIE, Vol. 3739, in Optical Fabrication and Testing, R. Geyl, J. Maxwell, eds. (1999) pp. 259-273.
    • (1999) Proc. SPIE , vol.3739 , pp. 259-273
    • Bray, M.1
  • 2
    • 2342564448 scopus 로고    scopus 로고
    • Measurements of large silicon spheres using the NIST M48 coordinate measuring machine
    • Recent Developments in Traceable Dimensional Measurements II, J.E. Decker, N. Brown, eds.
    • J. Stoup and T. Doiron, Measurements of Large Silicon Spheres using the NIST M48 Coordinate Measuring Machine, Proc. SPIE, Vol. 5190, in Recent Developments in Traceable Dimensional Measurements II, J.E. Decker, N. Brown, eds. (2003) pp. 277-288.
    • (2003) Proc. SPIE , vol.5190 , pp. 277-288
    • Stoup, J.1    Doiron, T.2
  • 3
    • 0038800777 scopus 로고    scopus 로고
    • Long trace profiler measurement repeatability improvements
    • P. Z. Takacs, E. L. Church, C. Bresloff, and L. Assoufid, Long trace profiler measurement repeatability improvements, Appl. Opt. 38, 5468-5479 (1999).
    • (1999) Appl. Opt. , vol.38 , pp. 5468-5479
    • Takacs, P.Z.1    Church, E.L.2    Bresloff, C.3    Assoufid, L.4
  • 4
    • 0025558304 scopus 로고
    • Angstrom level profilometry for submillimeter- To meter-scale surface errors
    • Advanced Optical Manufacturing and Testing, G. M. Sanger, P. B. Reid, and L. R. Baker, eds.
    • P. E. Glenn, Angstrom level profilometry for submillimeter- to meter-scale surface errors, Proc. SPIE, Vol.1333, in Advanced Optical Manufacturing and Testing, G. M. Sanger, P. B. Reid, and L. R. Baker, eds. (1990) pp. 326-336.
    • (1990) Proc. SPIE , vol.1333 , pp. 326-336
    • Glenn, P.E.1
  • 5
    • 85075504361 scopus 로고
    • Lambda-over-one-thousand metrology results for steep aspheres using a curvature profiling technique
    • Advanced Optical Manufacturing and Testing II, V. J. D. D.V.M, eds.
    • P. E. Glenn, Lambda-over-one-thousand metrology results for steep aspheres using a curvature profiling technique, Proc. SPIE, Vol. 1531, in Advanced Optical Manufacturing and Testing II, V. J. D. D.V.M, eds. (1992) pp. 64-61.
    • (1992) Proc. SPIE , vol.1531 , pp. 64-161
    • Glenn, P.E.1
  • 6
    • 0033343741 scopus 로고    scopus 로고
    • Novel scanning technique for ultra-precise measurement of topography
    • Optical Manufacturing and Testing III, H. Philip Stahl, ed.
    • I. Weingärtner, M. Schulz, and C. Elster, Novel scanning technique for ultra-precise measurement of topography, Proc. SPIE, Vol. 3782, in Optical Manufacturing and Testing III, H. Philip Stahl, ed. (1999) pp. 306-317.
    • (1999) Proc. SPIE , vol.3782 , pp. 306-317
    • Weingärtner, I.1    Schulz, M.2    Elster, C.3
  • 7
    • 0035761339 scopus 로고    scopus 로고
    • Measurement of steep aspheres: A step forward to nanometer accuracy
    • Optical Metrology for the Semiconductor, Optical, and Data Storage Industries II, A. Duparré and B. Singh, eds.
    • I. Weingärtner, M. Schulz, P. Thomscn-Schmidt, and C. Elster, Measurement of steep aspheres: a step forward to nanometer accuracy, Proc. SPIE, Vol. 4449, in Optical Metrology for the Semiconductor, Optical, and Data Storage Industries II, A. Duparré and B. Singh, eds. (2001) pp. 195-204.
    • (2001) Proc. SPIE , vol.4449 , pp. 195-204
    • Weingärtner, I.1    Schulz, M.2    Thomscn-Schmidt, P.3    Elster, C.4
  • 8
    • 0035760411 scopus 로고    scopus 로고
    • Tracing back radius of curvature and topography to the base unit of length with ultra-precision
    • Recent Developments in Traceable Dimensional Measurements, J. E. Decker and N. Brown, eds.
    • I. Weingärtner, M. Schulz, R. D. Geckler, O. Jusko, M. Neugebauer, A. Nicolaus, and G. Bönsch, Tracing back radius of curvature and topography to the base unit of length with ultra-precision, Proc. SPIE, Vol. 4401, in Recent Developments in Traceable Dimensional Measurements, J. E. Decker and N. Brown, eds. (2001) pp. 175-183.
    • (2001) Proc. SPIE , vol.4401 , pp. 175-183
    • Weingärtner, I.1    Schulz, M.2    Geckler, R.D.3    Jusko, O.4    Neugebauer, M.5    Nicolaus, A.6    Bönsch, G.7
  • 9
    • 0035075840 scopus 로고    scopus 로고
    • Topography measurement by a reliable large-area curvature sensor
    • M. Schulz, Topography measurement by a reliable large-area curvature sensor, Optik 112, 86-90 (2001).
    • (2001) Optik , vol.112 , pp. 86-90
    • Schulz, M.1
  • 10
  • 11
    • 0036425557 scopus 로고    scopus 로고
    • Simultaneous distance, slope, curvature, and shape measurement wilh a multi-purpose interferometer
    • Interferometry IX, W. Osten, ed.
    • I. Weingärtner, M. Schulz, C. Elster, J. Gerhardt, and A. Lucas, Simultaneous distance, slope, curvature, and shape measurement wilh a multi-purpose interferometer, Proc. SPIE, Vol. 4778, Interferometry IX, W. Osten, ed. (2002) pp. 198-205.
    • (2002) Proc. SPIE , vol.4778 , pp. 198-205
    • Weingärtner, I.1    Schulz, M.2    Elster, C.3    Gerhardt, J.4    Lucas, A.5
  • 13
    • 2342643492 scopus 로고    scopus 로고
    • Low- And mid-spatial frequency components measurement for aspheres
    • Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies, A. Duparre and B. Singh, eds.
    • M. Schulz, I. Weingärtner, C. Elster, and J. Gerhardt, Low- and mid-spatial frequency components measurement for aspheres, Proc. SPIE 5188, in Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies, A. Duparre and B. Singh, eds. (2003) pp. 287-295.
    • (2003) Proc. SPIE , vol.5188 , pp. 287-295
    • Schulz, M.1    Weingärtner, I.2    Elster, C.3    Gerhardt, J.4
  • 14
    • 2342467410 scopus 로고    scopus 로고
    • High accuracy form measurement of large optical surfaces
    • Recent developments in traceable dimensional measurements II, J. E. Decker and N. Brown, eds.
    • M. Schulz, R. D. Geckeler, and J. Illcmann, High accuracy form measurement of large optical surfaces, Proc. SPIE, Vol. 5190, in Recent developments in traceable dimensional measurements II, J. E. Decker and N. Brown, eds. (2003) pp. 211-219.
    • (2003) Proc. SPIE , vol.5190 , pp. 211-219
    • Schulz, M.1    Geckeler, R.D.2    Illcmann, J.3
  • 15
    • 0141887324 scopus 로고    scopus 로고
    • Information theoretical optimization for optical range sensors
    • C. Wagner and G. Häusler, Information theoretical optimization for optical range sensors, Appl. Opt. 42, 5418-5426 (2003).
    • (2003) Appl. Opt. , vol.42 , pp. 5418-5426
    • Wagner, C.1    Häusler, G.2
  • 16
    • 0037965537 scopus 로고    scopus 로고
    • 2 f(x) is known at discrete measurement points
    • X-ray Mirrors, Crystals, and Multilayers II, A. K. Freund, A. T. Macrander, T. Ishikawa, and J. L. Wood, eds.
    • 2 f(x) is known at discrete measurement points, Proc. SPIE, Vol. 478, in X-ray Mirrors, Crystals, and Multilayers II, A. K. Freund, A. T. Macrander, T. Ishikawa, and J. L. Wood, eds. (2002) pp. 12-20.
    • (2002) Proc. SPIE , vol.478 , pp. 12-20
    • Elster II, C.1
  • 17
    • 29244463592 scopus 로고    scopus 로고
    • Uncertainties in Aspheric Profile Measurements with the Geometry Measuring Machine at NIST
    • Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies II, A. Duparre, B. Singh, Zu-Han Gu, eds.
    • U. Griesmann, N. Machkour-Deshayes, J. Soons, B. Chang Kim, Q. Wang, J. R. Stoup, and L. Assoufid, Uncertainties in Aspheric Profile Measurements with the Geometry Measuring Machine at NIST, Proc. SPIE, Vol. 5878, in Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies II, A. Duparre, B. Singh, Zu-Han Gu, eds. (2005) pp. 112-124.
    • (2005) Proc. SPIE , vol.5878 , pp. 112-124
    • Griesmann, U.1    Machkour-Deshayes, N.2    Soons, J.3    Kim, B.C.4    Wang, Q.5    Stoup, J.R.6    Assoufid, L.7
  • 19
    • 33750193544 scopus 로고    scopus 로고
    • www.hexapods.net/index.htm.
  • 22
    • 67649345185 scopus 로고
    • An improved Bonferrroni procedure for multiple tests of significance
    • R. J. Simes, An improved Bonferrroni procedure for multiple tests of significance, Biometrika 73, 751-754 (1986).
    • (1986) Biometrika , vol.73 , pp. 751-754
    • Simes, R.J.1
  • 23
    • 0041111279 scopus 로고
    • Behrens-Fisher problem
    • S. Kotz and N. L. Johnson, eds., John Wiley and Sons, New York
    • C. K. Robinson, Behrens-Fisher Problem, Encyclopedia of Statistical Sciences, S. Kotz and N. L. Johnson, eds., Vol. 1, John Wiley and Sons, New York (1982) pp. 205-209.
    • (1982) Encyclopedia of Statistical Sciences , vol.1 , pp. 205-209
    • Robinson, C.K.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.