-
1
-
-
0032660619
-
Stitching interferometery: How and why it works
-
Optical Fabrication and Testing, R. Geyl, J. Maxwell, eds.
-
M. Bray, Stitching interferometery: How and why it works, Proc. SPIE, Vol. 3739, in Optical Fabrication and Testing, R. Geyl, J. Maxwell, eds. (1999) pp. 259-273.
-
(1999)
Proc. SPIE
, vol.3739
, pp. 259-273
-
-
Bray, M.1
-
2
-
-
2342564448
-
Measurements of large silicon spheres using the NIST M48 coordinate measuring machine
-
Recent Developments in Traceable Dimensional Measurements II, J.E. Decker, N. Brown, eds.
-
J. Stoup and T. Doiron, Measurements of Large Silicon Spheres using the NIST M48 Coordinate Measuring Machine, Proc. SPIE, Vol. 5190, in Recent Developments in Traceable Dimensional Measurements II, J.E. Decker, N. Brown, eds. (2003) pp. 277-288.
-
(2003)
Proc. SPIE
, vol.5190
, pp. 277-288
-
-
Stoup, J.1
Doiron, T.2
-
3
-
-
0038800777
-
Long trace profiler measurement repeatability improvements
-
P. Z. Takacs, E. L. Church, C. Bresloff, and L. Assoufid, Long trace profiler measurement repeatability improvements, Appl. Opt. 38, 5468-5479 (1999).
-
(1999)
Appl. Opt.
, vol.38
, pp. 5468-5479
-
-
Takacs, P.Z.1
Church, E.L.2
Bresloff, C.3
Assoufid, L.4
-
4
-
-
0025558304
-
Angstrom level profilometry for submillimeter- To meter-scale surface errors
-
Advanced Optical Manufacturing and Testing, G. M. Sanger, P. B. Reid, and L. R. Baker, eds.
-
P. E. Glenn, Angstrom level profilometry for submillimeter- to meter-scale surface errors, Proc. SPIE, Vol.1333, in Advanced Optical Manufacturing and Testing, G. M. Sanger, P. B. Reid, and L. R. Baker, eds. (1990) pp. 326-336.
-
(1990)
Proc. SPIE
, vol.1333
, pp. 326-336
-
-
Glenn, P.E.1
-
5
-
-
85075504361
-
Lambda-over-one-thousand metrology results for steep aspheres using a curvature profiling technique
-
Advanced Optical Manufacturing and Testing II, V. J. D. D.V.M, eds.
-
P. E. Glenn, Lambda-over-one-thousand metrology results for steep aspheres using a curvature profiling technique, Proc. SPIE, Vol. 1531, in Advanced Optical Manufacturing and Testing II, V. J. D. D.V.M, eds. (1992) pp. 64-61.
-
(1992)
Proc. SPIE
, vol.1531
, pp. 64-161
-
-
Glenn, P.E.1
-
6
-
-
0033343741
-
Novel scanning technique for ultra-precise measurement of topography
-
Optical Manufacturing and Testing III, H. Philip Stahl, ed.
-
I. Weingärtner, M. Schulz, and C. Elster, Novel scanning technique for ultra-precise measurement of topography, Proc. SPIE, Vol. 3782, in Optical Manufacturing and Testing III, H. Philip Stahl, ed. (1999) pp. 306-317.
-
(1999)
Proc. SPIE
, vol.3782
, pp. 306-317
-
-
Weingärtner, I.1
Schulz, M.2
Elster, C.3
-
7
-
-
0035761339
-
Measurement of steep aspheres: A step forward to nanometer accuracy
-
Optical Metrology for the Semiconductor, Optical, and Data Storage Industries II, A. Duparré and B. Singh, eds.
-
I. Weingärtner, M. Schulz, P. Thomscn-Schmidt, and C. Elster, Measurement of steep aspheres: a step forward to nanometer accuracy, Proc. SPIE, Vol. 4449, in Optical Metrology for the Semiconductor, Optical, and Data Storage Industries II, A. Duparré and B. Singh, eds. (2001) pp. 195-204.
-
(2001)
Proc. SPIE
, vol.4449
, pp. 195-204
-
-
Weingärtner, I.1
Schulz, M.2
Thomscn-Schmidt, P.3
Elster, C.4
-
8
-
-
0035760411
-
Tracing back radius of curvature and topography to the base unit of length with ultra-precision
-
Recent Developments in Traceable Dimensional Measurements, J. E. Decker and N. Brown, eds.
-
I. Weingärtner, M. Schulz, R. D. Geckler, O. Jusko, M. Neugebauer, A. Nicolaus, and G. Bönsch, Tracing back radius of curvature and topography to the base unit of length with ultra-precision, Proc. SPIE, Vol. 4401, in Recent Developments in Traceable Dimensional Measurements, J. E. Decker and N. Brown, eds. (2001) pp. 175-183.
-
(2001)
Proc. SPIE
, vol.4401
, pp. 175-183
-
-
Weingärtner, I.1
Schulz, M.2
Geckler, R.D.3
Jusko, O.4
Neugebauer, M.5
Nicolaus, A.6
Bönsch, G.7
-
9
-
-
0035075840
-
Topography measurement by a reliable large-area curvature sensor
-
M. Schulz, Topography measurement by a reliable large-area curvature sensor, Optik 112, 86-90 (2001).
-
(2001)
Optik
, vol.112
, pp. 86-90
-
-
Schulz, M.1
-
11
-
-
0036425557
-
Simultaneous distance, slope, curvature, and shape measurement wilh a multi-purpose interferometer
-
Interferometry IX, W. Osten, ed.
-
I. Weingärtner, M. Schulz, C. Elster, J. Gerhardt, and A. Lucas, Simultaneous distance, slope, curvature, and shape measurement wilh a multi-purpose interferometer, Proc. SPIE, Vol. 4778, Interferometry IX, W. Osten, ed. (2002) pp. 198-205.
-
(2002)
Proc. SPIE
, vol.4778
, pp. 198-205
-
-
Weingärtner, I.1
Schulz, M.2
Elster, C.3
Gerhardt, J.4
Lucas, A.5
-
12
-
-
0036316077
-
Reconstructing surface profiles from curvature measurements
-
C. Elster, J. Gerhardt, P. Thomsen-Schmidt, M. Schulz, and I. Weingärtner, Reconstructing surface profiles from curvature measurements, Optik 113, 154-158 (2002).
-
(2002)
Optik
, vol.113
, pp. 154-158
-
-
Elster, C.1
Gerhardt, J.2
Thomsen-Schmidt, P.3
Schulz, M.4
Weingärtner, I.5
-
13
-
-
2342643492
-
Low- And mid-spatial frequency components measurement for aspheres
-
Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies, A. Duparre and B. Singh, eds.
-
M. Schulz, I. Weingärtner, C. Elster, and J. Gerhardt, Low- and mid-spatial frequency components measurement for aspheres, Proc. SPIE 5188, in Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies, A. Duparre and B. Singh, eds. (2003) pp. 287-295.
-
(2003)
Proc. SPIE
, vol.5188
, pp. 287-295
-
-
Schulz, M.1
Weingärtner, I.2
Elster, C.3
Gerhardt, J.4
-
14
-
-
2342467410
-
High accuracy form measurement of large optical surfaces
-
Recent developments in traceable dimensional measurements II, J. E. Decker and N. Brown, eds.
-
M. Schulz, R. D. Geckeler, and J. Illcmann, High accuracy form measurement of large optical surfaces, Proc. SPIE, Vol. 5190, in Recent developments in traceable dimensional measurements II, J. E. Decker and N. Brown, eds. (2003) pp. 211-219.
-
(2003)
Proc. SPIE
, vol.5190
, pp. 211-219
-
-
Schulz, M.1
Geckeler, R.D.2
Illcmann, J.3
-
15
-
-
0141887324
-
Information theoretical optimization for optical range sensors
-
C. Wagner and G. Häusler, Information theoretical optimization for optical range sensors, Appl. Opt. 42, 5418-5426 (2003).
-
(2003)
Appl. Opt.
, vol.42
, pp. 5418-5426
-
-
Wagner, C.1
Häusler, G.2
-
16
-
-
0037965537
-
2 f(x) is known at discrete measurement points
-
X-ray Mirrors, Crystals, and Multilayers II, A. K. Freund, A. T. Macrander, T. Ishikawa, and J. L. Wood, eds.
-
2 f(x) is known at discrete measurement points, Proc. SPIE, Vol. 478, in X-ray Mirrors, Crystals, and Multilayers II, A. K. Freund, A. T. Macrander, T. Ishikawa, and J. L. Wood, eds. (2002) pp. 12-20.
-
(2002)
Proc. SPIE
, vol.478
, pp. 12-20
-
-
Elster II, C.1
-
17
-
-
29244463592
-
Uncertainties in Aspheric Profile Measurements with the Geometry Measuring Machine at NIST
-
Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies II, A. Duparre, B. Singh, Zu-Han Gu, eds.
-
U. Griesmann, N. Machkour-Deshayes, J. Soons, B. Chang Kim, Q. Wang, J. R. Stoup, and L. Assoufid, Uncertainties in Aspheric Profile Measurements with the Geometry Measuring Machine at NIST, Proc. SPIE, Vol. 5878, in Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies II, A. Duparre, B. Singh, Zu-Han Gu, eds. (2005) pp. 112-124.
-
(2005)
Proc. SPIE
, vol.5878
, pp. 112-124
-
-
Griesmann, U.1
Machkour-Deshayes, N.2
Soons, J.3
Kim, B.C.4
Wang, Q.5
Stoup, J.R.6
Assoufid, L.7
-
19
-
-
33750193544
-
-
www.hexapods.net/index.htm.
-
-
-
-
22
-
-
67649345185
-
An improved Bonferrroni procedure for multiple tests of significance
-
R. J. Simes, An improved Bonferrroni procedure for multiple tests of significance, Biometrika 73, 751-754 (1986).
-
(1986)
Biometrika
, vol.73
, pp. 751-754
-
-
Simes, R.J.1
-
23
-
-
0041111279
-
Behrens-Fisher problem
-
S. Kotz and N. L. Johnson, eds., John Wiley and Sons, New York
-
C. K. Robinson, Behrens-Fisher Problem, Encyclopedia of Statistical Sciences, S. Kotz and N. L. Johnson, eds., Vol. 1, John Wiley and Sons, New York (1982) pp. 205-209.
-
(1982)
Encyclopedia of Statistical Sciences
, vol.1
, pp. 205-209
-
-
Robinson, C.K.1
|