Measurement of steep aspheres: A step forward to nanometer accuracy

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4449, Issue , 2001, Pages 195-204

  Weingärtner, Ingolf ^a   Schulz, Michael ^a   Thomsen Schmidt, Peter ^a   Elster, Clemens ^a  

^a PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

Author keywords

Asphers; Complex surfaces; Curvature; Topography; Ultra precision

Indexed keywords

ALGORITHMS; CALIBRATION; MEASUREMENT ERRORS; PHYSICAL PROPERTIES; SENSORS; SURFACE TOPOGRAPHY;

ASPHERES; COMPLEX SURFACES; CURVATURE; NANOMETER;

MEASUREMENTS;

EID: 0035761339     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.450095     Document Type: Article

References (12)

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