Simultaneous distance, slope, curvature and shape measurement with a multi-purpose interferometer

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4778, Issue , 2002, Pages 198-205

  Weingärtner, Ingolf ^a   Schulz, Michael ^a   Elster, Clemens ^a   Gerhardt, Joachim ^a   Lucas, Axel ^a  

^a PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

Author keywords

Aspheres; Complex surfaces; Curvature; Fringe processing; Global optimization; Interferometer design; Topography

Indexed keywords

DISTANCE MEASUREMENT; GLOBAL OPTIMIZATION; INTERFEROMETRY; LASER BEAMS; SURFACE MEASUREMENT; SURFACE TOPOGRAPHY; WAVEFRONTS;

FRINGE PROCESSING;

INTERFEROMETERS;

EID: 0036425557     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.473554     Document Type: Conference Paper

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