Low- and mid-spatial frequency components measurement for aspheres

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5188, Issue , 2003, Pages 287-295

  Schulz, M ^a,b   Weingartner I ^a,b   Eistet, C ^a,b   Gerhardt, J ^a,b  

^a PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

^b NONE   (Germany)

Author keywords

Curvature; ELACS; Form; LACS; LSFR; MSFR; Scanning; Stitching; Topography

Indexed keywords

ABERRATIONS; ASPHERICS; ERROR ANALYSIS; INFORMATION ANALYSIS; INTERFEROMETRY; NANOSTRUCTURED MATERIALS; PARAMETER ESTIMATION; SCANNING; SENSORS;

CURVATURE; EXTENDED LARGE AREA CURVATURE SCANNING (ELACS); FORM; LARGE AREA CURVATURE SCANNING (LACS); LSFR; MID-SPATIAL FREQUENCY RANGE (MSFR); STITCHING; TOPOGRAPHY;

SURFACE TOPOGRAPHY;

EID: 2342643492     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.503699     Document Type: Conference Paper

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