메뉴 건너뛰기




Volumn 112, Issue 2, 2001, Pages 86-90

Topography measurement by a reliable large-area curvature sensor

Author keywords

Aspheres; Complex surfaces; Curvature; Optical scanning techniques; Topography

Indexed keywords

ASPHERICS; OPTICAL SENSORS; SCANNING; SURFACE TOPOGRAPHY; SURFACES;

EID: 0035075840     PISSN: 00304026     EISSN: None     Source Type: Journal    
DOI: 10.1078/0030-4026-00015     Document Type: Article
Times cited : (25)

References (23)
  • 2
    • 0022256123 scopus 로고
    • Testing aspheric surfaces with computer generated holograms: Analysis of adjustment and shape errors
    • (1985) Appl. Opt. , vol.24 , pp. 2604-2611
    • Dörband, B.1    Tiziani, H.J.2
  • 5
    • 84975654195 scopus 로고
    • Curvature sensing and compensation: A new concept in adaptive optics
    • (1988) Appl. Opt. , vol.27 , pp. 1223-1225
    • Roddier, F.1
  • 6
    • 0029285083 scopus 로고
    • New method for estimating wavefront from curvature signal by curve fitting
    • (1995) Opt. Eng. , vol.34 , pp. 1232-1237
    • Han, I.1
  • 12
    • 0025558304 scopus 로고
    • Ångstrom level profilometry for sub-millimetre to meter scale surface errors
    • (1990) Proc. SPIE , vol.1333 , pp. 326-336
    • Glenn, P.1
  • 13
    • 85075504361 scopus 로고
    • Lambda-over-one-thousand metrology results for steep aspheres using a curvature profiling technique
    • (1991) Proc. SPIE , vol.1531 , pp. 54-61
    • Glenn, P.1
  • 14
    • 85031533753 scopus 로고
    • Développement des méthodes et outils de métrologie optique pour le projet Virgo
    • PhD Thesis, Université de Paris VII
    • (1995)
    • Loriette, V.1
  • 15
    • 85031521263 scopus 로고    scopus 로고
    • note
  • 16
    • 85031524292 scopus 로고    scopus 로고
    • note
  • 20
    • 85031521610 scopus 로고    scopus 로고
    • note
  • 21
    • 85031531646 scopus 로고    scopus 로고
    • Position encoders without integral bearing for hollow shafts
    • DR. JOHANNES HEIDENHAIN GmbH, Dr. Johannes-Heidenhain-Straße 5, D-83301 Traunreut, Germany
    • (1998) HEIDENHAIN Info , vol.5
    • Hagl, R.1
  • 22
    • 85031525666 scopus 로고    scopus 로고
    • note
  • 23
    • 0032678938 scopus 로고    scopus 로고
    • Critical aspects on testing aspheres in interferometric setups
    • (1999) Proc. SPIE , vol.3739 , pp. 317-323
    • Schillke, F.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.