Reconstructing surface profiles from curvature measurements

Optik (Jena)

Volumn 113, Issue 4, 2002, Pages 154-158

  Elster, Clemens ^a   Gerhardt, Joachim ^a   Thomsen Schmidt, Peter ^a   Schulz, Michael ^a   Weingärtner, Ingolf ^a  

^a PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

Author keywords

Aspheres; Curvature; Ordinary differential equation; Runge Kutta method; Topography

Indexed keywords

BOUNDARY VALUE PROBLEMS; CURVE FITTING; DIFFERENTIATION (CALCULUS); NUMERICAL METHODS; OPTICAL DATA PROCESSING; OPTICAL RESOLVING POWER; OPTICAL TESTING; ORDINARY DIFFERENTIAL EQUATIONS; RUNGE KUTTA METHODS;

CARTESIAN COORDINATES; CURVATURE MEASUREMENTS; NANOMETER SCALE; SURFACE PROFILES RECONSTRUCTION;

GEOMETRICAL OPTICS;

EID: 0036316077     PISSN: 00304026     EISSN: None     Source Type: Journal    
DOI: 10.1078/0030-4026-00138     Document Type: Article

References (10)

1. Interferometric testing of plane and cylindrical workpieces with computer-generated holograms
2. Testing aspheric surfaces with computer generated holograms: Analysis of adjustment and shape errors
3. Simple technique for testing deep aspherical surfaces
4. A high-precision coordinate measurement machine for aspherical optics
5. Topography measurement by a reliable large-area curvature sensor
6. 2f(x) is known at discrete measurement points