Uncertainties in aspheric profile measurements with the Geometry Measuring Machine at NIST

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5878, Issue , 2005, Pages 1-13

  Griesmann, Ulf ^a   Machkour Deshayes, Nadia ^a   Soons, Johannes ^a   Kim, Byoung Chang ^a   Wang, Quandou ^a   Stoup, John R ^a   Assoufid, Lahsen ^b  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

^b ARGONNE NATIONAL LABORATORY   (United States)

Author keywords

Aspheric surface profile; Profilometer; Surface curvature

Indexed keywords

COORDINATE MEASURING MACHINES; INTERFEROMETERS; PROFILOMETRY;

ASPHERIC SURFACE PROFILE; SURFACE CURVATURE;

ASPHERICS;

EID: 29244463592     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.615398     Document Type: Conference Paper

References (19)

1. M. P. do Carmo, Differential Geometry of Curves and Surfaces, Prentice Hall, 1976.
2. J. J. Stoker, Differential Geometry, Wiley-Interscience, New York, 1969.
3. P. E. Glenn, "Angstrom level profilometry for submillimeter- to meter- scale surface errors," in Advanced Optical Manufacturing and Testing, G. M. Sanger, P. B. Reid, and L. R. Baker, eds., Proc. SPIE 1333, pp. 326-336, 1990.
4. P. E. Glenn, "Lambda-over-one-thousand metrology results for steep aspheres using a curvature profiling technique," in Advanced Optical Manufacturing and Testing II, V. J. D. D.V.M, ed., Proc. SPIE 1531, pp. 64-61, 1992.
5. I. Weingärtner, M. Schulz, and C. Elster, "Novel scanning technique for ultra-precise measurement of topography," in Optical Manufacturing and Testing III, Proc. SPIE 3782, pp. 306-317, 1999.
6. I. Weingärtner, M. Schulz, P. Thomsen-Schmidt, and C. Elster, "Measurement of steep aspheres: a step forward to nanometer accuracy," in Optical Metrology for the Semiconductor, Optical, and Data Storage Industries II, A. Duparré and B. Singh, eds., Proc. SPIE 4449, pp. 195-204, 2001.
7. I. Weingärtner, M. Schulz, R. D. Geckler, O. Jusko, M. Neugebauer, A. Nicolaus, and G. Bönsch in Recent Developments in Traceable Dimensional Measurements, J. E. Decker and N. Brown, eds., Proc. SPIE 4401, pp. 175-183, 2001.
8. M. Schulz, "Topography measurement by a reliable large-area curvature sensor," Optik 112, pp. 86-90, 2001.
9. nd euspen International Conference, pp. 478-481, 2001.
10. I. Weingärtner, M. Schulz, C. Elster, J. Gerhardt, and A. Lucas, "Simultaneous distance, slope, curvature, and shape measurement with a multi-purpose interferometer," in Interferometry IX, W. Osten, ed., Proc. SPIE 4778, pp. 198-205, 2002.
11. C. Elster, J. Gerhardt, P. Thomsen-Schmidt, M. Schulz, and I. Weingärtner, "Reconstructing surface profiles from curvature measurements," Optik 113, pp. 154-158, 2002.
12. M. Schulz, I. Weingärtner, C. Elster, and J. Gerhardt, "Low- and mid-spatial frequency components measurement for aspheres," in Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies, A. Duparrë and B. Singh, eds., Proc. SPIE 5188, pp. 287-295, 2003.
13. M. Schulz, R. D. Geckeler, and J. Illemann, "High accuracy form measurement of large optical surfaces," in Recent developments in traceable dimensional measurements II, J. E. Decker and N. Brown, eds., Proc. SPIE 5190, pp. 211-219, 2003.
14. C. Wagner and G. Häusler, "Information theoretical optimization for optical range sensors," Appl. Opt. 42, pp. 5418-5426, 2003.
15. 2f(x) is known at discrete measurement points," in X-ray Mirrors, Crystals, and Multilayers II, A. K. Freund, A. T. Macrander, T. Ishikawa, and J. L. Wood, eds., Proc. SPIE 4782, pp. 12-20, 2002.
16. P. Z. Takacs and S. N. Qian, "Design of a long trace surface profiler," in Metrology: Figure and Finish, B. E. Truax, ed., Proc. SPIE 749, pp. 59-64, 1987.
17. P. Z. Takacs and S. N. Qian, "Surface profile interferometer. U.S. Patent 4,884,697," 1989.
18. P. Z. Takacs, E. L. Church, C. Bresloff, and L. Assoufid, "Long trace profiler measurement repeatability improvements," Appl. Opt. 38, pp. 5468-5479, 1999.
19. K. von Bieren, "Pencil beam interferometer for aspherical optical surfaces laser diagnostics," Proc. SPIE 343, pp. 101-108, 1982.