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Volumn 5190, Issue , 2003, Pages 277-288
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Measurements of Large Silicon Spheres Using the NIST M48 Coordinate Measuring Machine
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Author keywords
Accuracy; CMM; Comparison; Silicon sphere; Uncertainty
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Indexed keywords
CALIBRATION;
COORDINATE MEASURING MACHINES;
DAMPING;
DECISION MAKING;
DENSITY MEASUREMENT (OPTICAL);
INTERFEROMETERS;
LIGHTING;
MEASUREMENT THEORY;
REFRACTIVE INDEX;
SENSORS;
SURFACE ROUGHNESS;
THERMOMETERS;
ACCURACY;
ARTIFACTS;
COMPARISON;
SILICON SPHERE;
UNCERTAINTY;
SILICON;
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EID: 2342564448
PISSN: 0277786X
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1117/12.506317 Document Type: Conference Paper |
Times cited : (10)
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References (11)
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