High accuracy form measurement of large optical surfaces

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5190, Issue , 2003, Pages 211-220

  Schulz, M ^a   Geckeler, R D ^a   Illemann, J ^a,b  

^a PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

^b Möller Wedel GmbH   (Germany)

Author keywords

Autocollimator; Curvature; Dimensional metrology; ESAD; Flatness standard; LACS; Scanning deflectometry; Topography; Traceability

Indexed keywords

CALIBRATION; DATA REDUCTION; INTERFEROMETRY; MONTE CARLO METHODS; SENSORS; SURFACE TOPOGRAPHY;

AUTOCOLLIMATOR; CURVATURE; DEFLECTOMETRY; DIMENSIONAL METROLOGY; ESAD; FLATNESS STANDARD; LACS; TRACEABILITY;

OPTICAL SYSTEMS;

EID: 2342467410     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.503700     Document Type: Conference Paper

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