Tracing back radius of curvature and topography to the base unit of length with ultra-precision

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4401, Issue , 2001, Pages 175-183

  Weingärtner, Ingolf ^a   Schulz, Michael ^a   Geckeler, Ralf D ^a   Jusko, Otto ^a   Neugebauer, Michael ^a   Nicolaus, Arnold ^a   Bönsch, Gerhard ^a  

^a PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; CALCULATIONS; CALIBRATION; INTERFEROMETERS; MEASUREMENT ERRORS; SENSORS; SURFACE MEASUREMENT; SURFACE TOPOGRAPHY;

CURVATURE SENSOR; MEASUREMENT UNCERTAINTY;

MEASUREMENT THEORY;

EID: 0035760411     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.445618     Document Type: Article

References (7)

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2. I. Weingärtner, M. Schulz. C. Elster, FRINGE, Bremen, (2001), Method for evaluation of interferometric data: Surface type and surface error type matched fitting of interferograms.
3. M. Schulz, I. Weingärtner, Euspen, Turin (2001), Measurement of steep aspheres by curvature scanning: An uncertainty budget.
4. R. A. Nicolaus, and G. Bönsch, "A Novel Interferometer for Dimensional Measurement of a Silicon Sphere", IEEE Trans.Instrum. Meas., Vol. 46, pp. 563-565, 1997.
5. F. Lüdicke and H.-J. Rademacher, "Bestimmung von Maß und Form an Zylindern und Kugeln", PTB-Mitteilungen 6/89 (1989), p. 429-433.
6. O. Jusko, F. Lüdicke, "Novel multi-wave standards for the calibration of form measuring instruments", Proc. 1st EuSPEN, Bremen, Vol. 2, ISBN 3-8265-6085-X, 1999, 299-302.
7. R. Ziegenbein, F. Lüdicke, and G. Goch, "A New Ultra Precision Instrument for Calibration of Gauges and Measurements of High-Quality Products", Proceedings of 7th IPES (1993 Kobe, Japan), p. 24-27.