Hydrogen-plasma etching of hydrogenated amorphous silicon: A study by a combination of spectroscopic ellipsometry and trap-limited diffusion model

Philosophical Magazine

Volumn 84, Issue 6, 2004, Pages 595-609

  Kail F ^a,b   Fontcuberta i Morral, A ^b   Hadjadj, A ^a   Roca i Cabarrocas, P ^b   Beorchia, A ^a  

^a UNIVERSITÉ DE REIMS CHAMPAGNE ARDENNE   (France)

^b LABORATOIRE DE PHYSIQUE DES INTERFACES ET DES COUCHES MINCES   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ACTIVATION ENERGY; ELLIPSOMETRY; HYDROGENATION; INTERDIFFUSION (SOLIDS); PLASMA ETCHING; REACTION KINETICS; SPECTROSCOPIC ANALYSIS; THERMAL EFFECTS;

HYDROGEN TRAPPING; MICROCRYSTALLINE MATERIALS;

AMORPHOUS SILICON;

EID: 10744225826     PISSN: 14786435     EISSN: None     Source Type: Journal    
DOI: 10.1080/14786430310001635440     Document Type: Article

References (57)

1. AGARWAL, S., TAKANO, A., VAN DE SANDEN, M. C. M., MAROUDAS, D., and AYDIL, E. S., 2002, J. chem. Phys., 117, 10 805.
2. AN, I., Li, Y. M., WRONSKI, C. R., and COLLINS, R. W., 1993, Phys. Rev. B, 48, 4464.
3. ASPNES, D. E., STUDNA, A.A., and KINNSBRON, E., 1984, Phys. Rev. B, 29, 768.
4. AZZAM, R. M., and BASHARA, N. M., 1997, Ellipsometry and Polarized Light (Amsterdam: North-Holland), p. 274.
5. BEYER, W., and WAGNER, H., 1982, J. appl. Phys., 53, 8745.
6. BEYER, W., and ZASTROW, U., 1996, Amorphous Silicon Technology, edited by M. Hock, E. A. Schiff, S. Wagner, R. Schropp and A. Matsuda (Pittsburgh, Pennsylvania: Materials Research Society), p. 463.
7. BRANZ, H. M., REEDY, R., CRANDALL, R. S., MAHAN, H., Xu, Y., and NELSON, B. P., 2002, J. non-crystalline Solids, 299-302, 191.
8. BUDA, F., CHIAROTTI, G. L., CAR, R., and PARRINELLO, M., 1989, Phys. Rev. Lett., 63, 294.
9. CONDE, J. P., CHAN, K. K., BLUM, J. M., ARIENZO, M., MONTEIRO, P. A., FERREIRA, J. A., CHU, V., and WYRSH, N., 1993, J. appl. Phys., 73, 1826.
10. DAS, U. K., YASUDA, T., and YAMASAKI, S., 2000, Phys. Rev. Lett., 85, 2324; 2001, Phys. Rev. B, 63, 245 204.
11. DAS, U. K., YASUDA, T., and YAMASAKI, S., 2000, Phys. Rev. Lett., 85, 2324; 2001, Phys. Rev. B, 63, 245 204.
12. DERSCH, H., STUKE, J., and BEICHLER, J., 1980, Appl. Phys. Lett., 38, 456.
13. FONTCUBERTA I MORRAL, A., and ROCA I CABARROCAS, P., 2002, J. non-crystalline Solids, 299-302, 196.
14. FRANZ, A. J., MAVRIKAKIS, M., and GLAND, J. L., 1998, Phys. Rev. B, 57, 3927.
15. GERBI, J. E., and ABELSON, J. R., 2001, J. appl. Phys., 89, 1463.
16. HERRING, C., and JONHSON, N. M., 1991, Hydrogen in Semiconductors, edited by J.I. Pankove and N. M. Johnson (Boston, Massachusetts: Academic Press), p. 225.
17. JACKSON, W. B., 1996, Curr. Opinion, Solid St. Mater. Sci., 1, 562.
18. JACKSON, W. B., FRANZ, A. J., JIN, H. C., ABELSON, J. R., and GLAND, J. L., 1998, J. non-crystalline Solids, 227-230, 143.
19. JACKSON, W. B., and TSAI, C. C., 1992, Phys. Rev. B, 45, 6564.
20. JOHNSON, N. M., WALKER, J., and STEVENS, K. S., 1991, J. appl. Phys., 69, 2631.
21. KEMP, M., and BRANZ, H. M., 1993, Phys. Rev. B, 47, 7067.
22. KLEIDER, J. P., LONGEAUD, C., and ROCA I CABARROCAS, P., 1992, J. appl. Phys., 72, 4727; 1993, J. non-crystalline Solids, 164-166, 403.
23. KLEIDER, J. P., LONGEAUD, C., and ROCA I CABARROCAS, P., 1992, J. appl. Phys., 72, 4727; 1993, J. non-crystalline Solids, 164-166, 403.
24. LAYADI, N., ROCA I CABARROCAS, P., DRÉVILLON, B., and SOLOMON, I., 1995, Phys. Rev. B, 52, 5136.
25. MATSUDA, A., 1983, J. non-crystalline Solids, 59-60, 767.
26. MUI, K., and SMITH, F., 1988, Phys. Rev. B, 38, 10623.
27. NAKAMURA, M., OHNO, T., MIYATA, K., KONISHI, N., and SUZUKI, T., 1989, J. appl. Phys., 65, 3061.
28. NAKAMURA, K., YOSHIDA, K., TAKEOKA, S., and SHIMIZU, I., 1995, Jap. J. appl. Phys., 34, 442.
29. NICKEL, N. H. (editor), 1999, Semicond. Semimetals, 61.
30. NICKEL, N. H., JACKSON, W. B., and WALKER, J., 1996, Phys. Rev. B, 53, 7750.
31. PANKOVE, J. I. and JONHSON, N. M. (editors), 1991, Semicond. Semimetals, 34.
32. PEARTON, S. J., CORBETT, J. W., and STAVOLA, M., 1991, Hydrogen in Crystalline Semiconductors, edited by H. J. Queisser (Berlin: Springer), p. 10.
33. RIZK, R., DE MIERRY, P., BALLUTAUD, D., AUCOUTURIER, M., and MATHIOT, D., 1991, Phys. Rev. B, 44, 6141.
34. ROBERTSON, J., CHEN, C. W., POWELL, M. J., and DEANE, S. C., 1998, J. non-crystalline Solids, 227-230, 138.
35. SANTOS, P. V., and JACKSON, W. B., 1992, Phys. Rev. B, 46, 4595.
36. SHINAR, J., SHINAR, R., WILLIAMSON, D. L., MITRA, S., KAVAK, H., and DALAL, V. L., 1999, Phys. Rev. B, 60, 15875.
37. SHINAR, R., SHINAR, J., JIA, H., and WU, X. L., 1993, Phys. Rev. B, 47, 9361.
38. SLADEK, P., ST' AHEL, P., ROCA I CABARROCAS, P., and MORIN, P., 1998, Phil. Mag. B, 77, 1049.
39. STAEBLER, D. L., and WRONSKI, C. R., 1977, Appl. Phys. Lett., 31, 292.
40. STREET, R. A., 1991a, Hydrogenated Amorphous Silicon, edited by R. W. Cahn, E. A. Davis and I. M. Ward (Cambridge: Cambridge University Press), p. 51; 1991b, Phys. Rev. B, 43, 2454.
41. STREET, R. A., 1991a, Hydrogenated Amorphous Silicon, edited by R. W. Cahn, E. A. Davis and I. M. Ward (Cambridge: Cambridge University Press), p. 51; 1991b, Phys. Rev. B, 43, 2454.
42. STREET, R. A., HACKAND, M., and JACKSON, W. B., 1988, Phys. Rev. B, 37, 4209.
43. STREET, R. A., TSAI, C.C., KAKALIOS, J., and JACKSON, W. B., 1987, Phil. Mag. B, 56, 305.
44. TANG, X. M., WEBER, J., BAER, Y., and FINGER, F., 1990a, Phys. Rev. B, 41, 7945; 1990b, Phys. Rev. B, 42, 7277.
45. TANG, X. M., WEBER, J., BAER, Y., and FINGER, F., 1990a, Phys. Rev. B, 41, 7945; 1990b, Phys. Rev. B, 42, 7277.
46. TSAI, C. C., ANDERSON, G. B., THOMPSON, R., and WACKER, B., 1989, J. non-crystalline Solids, 114, 151.
47. TULCHINSKY, D. A., CORBETT, J. W., BORENSTEIN, J. T., and PEARTON, S. J., 1990, Phys. Rev. B, 42, 11881.
48. VAN DE WALLE, C. G., 1994, Phys. Rev. B, 49, 4579; 1998, J. non- crystalline Solids, 227-230, 111.
49. VAN DE WALLE, C. G., 1994, Phys. Rev. B, 49, 4579; 1998, J. non- crystalline Solids, 227-230, 111.
50. VON KEUDELL, A., and ABELSON, J.R., 1998, J. appl. Phys., 84, 489.
51. WAITE, T. R., 1957, Phys. Rev., 107, 463.
52. WIDMER, A. E., FEHLMANN, R., and MAGEE, C. W., 1983, J. non- crystalline Solids, 54, 199.
53. YAMASAKI, S., DAS, U. K., and YASUDA, T., 2002, J. non-crystalline Solids, 299-302, 185.
54. YANG, Y. H., KATIYAR, M., FENG, G. F., MALEY, N., and ABELSON, J. R., 1994, Appl. Phys. Lett., 65, 1769.
55. ZAFAR, S., and SCHIFF, E. A., 1991, Phys. Rev. Lett., 66, 1493.
56. ZELLAMA, K., GERMAIN, P., SQUELARD, S., BOURDON, B., FONTENILLE, J., and DANIELOU, R., 1981, Phys. Rev., B, 23, 6648.
57. ZHANG, S. B., and JACKSON, W. B., 1991, Phys. Rev. B, 43, 12 142.