Solubility and diffusion of hydrogen in hydrogenated crystalline and amorphous silicon

Journal of Non-Crystalline Solids

Volumn 227-230, Issue PART 2, 1998, Pages 880-884

  Beyer, W ^a   Zastrow, U ^a  

^a FORSCHUNGSZENTRUM JÜLICH   (Germany)

Author keywords

Amorphous Si:H; Crystalline Si:H; Hydrogen diffusion; Hydrogen implantation; Hydrogen solubility

Indexed keywords

AMORPHOUS SILICON; CRYSTAL MICROSTRUCTURE; CRYSTALLINE MATERIALS; DIFFUSION IN SOLIDS; HYDROGEN; SOLUBILITY;

HYDROGEN DIFFUSION;

SEMICONDUCTING SILICON;

EID: 0032065121     PISSN: 00223093     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-3093(98)00225-7     Document Type: Article

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