Investigation of hydrogen induced phase transition from a-Si:H to μc-Si:H using real time infrared spectroscopy

Materials Science and Engineering: A

Volumn 304-306, Issue 1-2, 2001, Pages 349-352

  Katiyar, Monica ^a   Abelson, John R ^b  

^a INDIAN INSTITUTE OF TECHNOLOGY KANPUR   (India)

^b University of Illinois at Urbana Champaign   (United States)

Author keywords

Amorphous silicon; Infrared spectroscopy; Microcrystalline silicon

Indexed keywords

CRYSTALS; HYDROGEN; HYDROGEN BONDS; INFRARED SPECTROSCOPY; PHASE TRANSITIONS; SILICON;

AMORPHOUS SILICONS;

MATERIALS SCIENCE;

MICROSTRUCTURE; PHYSICAL PROPERTY;

EID: 0035978860     PISSN: 09215093     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0921-5093(00)01528-8     Document Type: Article

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