Fluorine in Si: Native-defect complexes and the suppression of impurity diffusion

Physical Review B - Condensed Matter and Materials Physics

Volumn 72, Issue 4, 2005, Pages

  Lopez, Giorgia M ^a   Fiorentini, Vincenzo ^a   Impellizzeri, Giuliana ^a   Mirabella, Salvatore ^a   Napolitani, Enrico ^b  

^a UNIVERSITY OF CATANIA   (Italy)

^b UNIVERSITY OF PADOVA   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 33749233639     PISSN: 10980121     EISSN: 1550235X     Source Type: Journal    
DOI: 10.1103/PhysRevB.72.045219     Document Type: Article

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