Mechanism of boron diffusion in silicon: An Ab initio and kinetic monte carlo study

Physical Review Letters

Volumn 83, Issue 21, 1999, Pages 4341-4344

  Sadigh, Babak ^a   Lenosky, Thomas J ^a   Theiss, Silva K ^a   Caturla, Maria Jose ^a   Diaz de La Rubia, Tomas ^a   Foad, Majeed A ^b  

^a LAWRENCE LIVERMORE NATIONAL LABORATORY   (United States)

^b APPLIED MATERIALS INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001739179     PISSN: 00319007     EISSN: 10797114     Source Type: Journal    
DOI: 10.1103/PhysRevLett.83.4341     Document Type: Article

References (30)

1. P. M. Fahey, B. P. Griffin, and J. D. Plummer, Rev. Mod. Phys. 61, 289, (1989).
2. G. D. Watkins, Phys. Rev. B. 12, 5824, (1975).
3. J. R. Troxell, and G. D. Watkins, Phys. Rev. B. 22, 921, (1980).
4. R. D. Harris, J. L. Newton, and G. D. Watkins, Phys. Rev. Lett. 48, 1271, (1982).
5. U. Gösele, and H. Strunk, Appl. Phys. 20, 263, (1979).
6. A. Antoniadis, and I. Moskowitz, J. Appl. Phys. 53, 6788, (1982).
7. T. Y. Tan, and U. Gösele, Appl. Phys. Lett. 40, 616, (1982).
8. T. Y. Tan, U. Gösele, and F. F. Morehead, Appl. Phys. A. 31, 108, (1983).
9. U. Gösele, and T. Y. Tan, in Defects in Semiconductors II, J. W. Corbett, and S. Mahayan, (North-Holland, New York, 1983), p. 45.
10. U. Gösele, W. Frank, and A. Seeger, Appl. Phys. 23, 361, (1980).
11. R. Car, P. J. Kelly, A. Oshiyama, and S. T. Pantelides, Phys. Rev. Lett. 54, 260, (1985).
12. C. S. Nichols, C. G. Van de Walle, and S. T. Pantelides, Phys. Rev. Lett. 62, 1049, (1989).
13. C. S. Nichols, C. G. Van de Walle, S. T. Pantelides, Phys. Rev. B. 40, 5484, (1989).
14. N. E. B. Cowern, K. T. F. Janssen, G. F. A. van de Walle, and D. J. Gravesteijn, Phys. Rev. Lett. 65, 2434, (1990).
15. N. E. B. Cowern, G. F. A. van de Walle, D. J. Gravesteijn, and C. J. Vreizema, Phys. Rev. Lett. 67, 212, (1991).
16. J. Zhu, T. Diaz de la Rubia, L. H. Yang, C. Mailhoit, and G. H. Gilmer, Phys. Rev. B. 54, 4741, (1996).
17. J. Zhu, Comput. Mater. Sci. 12, 309, (1998).
18. W. Windl, M. M. Buena, R. Stumpf, S. T. Dunham, and M. P. Masquelier, Mater. Res. Soc. Symp. Proc. 568, 91, (1999).
19. G. Kresse, and J. Hafner, Phys. Rev. B. 47, RC558, (1993).
20. G. Kresse, thesis, Technische Universität Wien, 1993.
21. G. Kresse, and J. Furthmüller, Comput. Mater. Sci. 6, 15–50, (1996).
22. G. Kresse, and J. Furthmüller, Phys. Rev. B. 54, 11 169, (1996).
23. G. Kresse, and J. Hafner, J. Phys. Condens. Matter. 6, 8245, (1994).
24. D. Vanderbilt, Phys. Rev. B. 41, 7892, (1990).
25. T. R. Waite, Phys. Rev. 107, 463, (1957).
26. H. Bracht, N. A. Stolwijk, and H. Mehrer, Phys. Rev. B. 52, 16 542, (1995).
27. H. Bracht, E. E. Haller, and R. Clark-Phelps, Phys. Rev. Lett. 81, 393, (1998).
28. B. Folmer, Y. M. Haddara, and M. E. Law, (private communication).
29. S. Coffa, and S. Libertino, Appl. Phys. Lett. 73, 3369, (1998).
30. Y. C. Zhao, M. J. Aziz, H. J. Gossmann, and S. Mitha, Appl. Phys. Lett. 74, 31, (1999).