Torsional ratcheting actuating system

2000 International Conference on Modeling and Simulation of Microsystems - MSM 2000

Volumn , Issue , 2000, Pages 273-276

  Barnes, Stephen M ^a   Miller, Samuel L ^a   Rodgers, M Steven ^a   Bitsie, Fernando ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

Actuator; Comb; Electrostatic; MEMS; Ratchet

Indexed keywords

COMB; RAYCHETING; SIGNALS CONTROL; TORSION FRAME;

ELECTROSTATICS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; NATURAL FREQUENCIES; PIEZOELECTRIC DEVICES; SCANNING ELECTRON MICROSCOPY; TORSIONAL STRESS;

ACTUATORS;

EID: 6344237456     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)

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