Non-destructive resonant frequency measurement on MEMS actuators

Annual Proceedings - Reliability Physics (Symposium)

Volumn , Issue , 2001, Pages 99-105

  Smith, N F ^a   Tanner, D M ^a   Swanson, S E ^a   Miller, S L ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; DAMPING; DIFFERENTIAL EQUATIONS; ELECTRIC VARIABLES MEASUREMENT; FRICTION; NATURAL FREQUENCIES; OSCILLATIONS; RESONATORS; SCANNING ELECTRON MICROSCOPY;

COMB DRIVERESONATOR; RESONANT FREQUENCY MEASUREMENT; SLIDING FRICTION; TORSIONAL RACHET ACTUATORS; VISCOUS DAMPING;

MICROELECTROMECHANICAL DEVICES;

EID: 0035013709     PISSN: 00999512     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (12)

1. A system for automatic electrical and optical characterization of microelectromechanical devices
2. Electromechanical characterization of microresonators for circuit applications
3. The effect of frequency on the lifetime of a surface micromachined microengine driving a load
4. Multidimensional motion analysis of MEMS using computer microvision
5. A performance analysis system for MEMS using automated imaging methods
6. First reliability test of a surface micromachined microengine using SHiMMeR
7. Designing and operating electrostatically driven microengines
8. The effect of humidity on the reliability of a surface micromachined micro-engine
9. The resonant gate transistor
10. Torsional ratcheting actuating system
11. Reliability of a MEMS torsional ratcheting actuator