Calculation of electrostatic forces and torques in MEMS using path-independent integrals

Journal of Micromechanics and Microengineering

Volumn 10, Issue 3, 2000, Pages 477-482

  Hui, C Y ^a   Yeh, J L A ^b   Tien, N C ^b  

^a Department of Obstetrics Gynecology   (United States)

^b Cornell University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CARRIER CONCENTRATION; ELECTROSTATICS; MICROMACHINING; TENSORS;

MAXWELL STRESS TENSOR; PATH INDEPENDENT INTEGRALS;

MICROELECTROMECHANICAL DEVICES;

EID: 0034272728     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/10/3/325     Document Type: Article

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