A novel electrostatic vertical comb actuator fabricated on (111) silicon wafer

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2003, Pages 56-59

  Chu, Chien Cheng ^a   Tsai, Julius M ^a   Hsieh, Jerwei ^a   Fang, Weileun ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; BONDING; OPTIMIZATION; SEMICONDUCTOR DEVICE MANUFACTURE; SEMICONDUCTOR DEVICE STRUCTURES; SEMICONDUCTOR DEVICE TESTING; SILICON WAFERS;

ELECTROSTATIC VERTICAL COMB ACTUATOR; REDUCED DRIVING VOLTAGE; SIDE STICKING EFFECT;

ELECTROSTATIC ACTUATORS;

EID: 0037818353     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)

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2. R.A. Conant, J.T. Nee, K.Y. Lau, and R.S. Muller, "A flat high-frequency scanning micromirror," in Proceeding of 2000 Solid-state Sensor and Actuator Workshop (Hilton Head), Hilton Head Island, SC, USA, June 2000, pp. 6-13.
3. H. Schenk, P. Durr, T. Haase, D. Kunze, U. Sobe, H. Lakner, and H. Kuck, "Large deflection micromechanical scanning mirrors for linear scans and pattern generation," IEEE Journal of Selected Topics in Quantum Electronics, vol. 6, pp. 715-722, 2000.
4. J. Kim, S. Park, and D. Cho, "A Novel Electrostatic Vertical Actuator Fabricated in one Homogeneous Silicon Wafer Using Extended SBM Technology," Transducers'01, Munich, Germany, June 2001, vol. 1, pp. 756-759.
5. J. Hsieh, C. C. Chu, J. M. Tsai, and W. Fang, "Using Extended BELST Process in Fabrication Vertical Comb Actuator for Optical Application," IEEE/LEOS International Conference on Optical MEMS, Lugano, Switzerland, Aug. 20-23, 2002 Paper WP 39.
6. J. Hsieh and W. Fang, "A Boron Etch-stop Assisted Lateral Silicon Etching Process for Improved High-Aspect-Ratio Silicon Micromachining and Its Applications," Journal of Microelectromechanical Systems, vol. 12, pp. 574-581, 2002.