-
3
-
-
0028462569
-
-
L. Boufendi, J. Hermann, A. Bouchoule, et al., J. Appl. Phys. 76, 148 (1994).
-
(1994)
J. Appl. Phys.
, vol.76
, pp. 148
-
-
Boufendi, L.1
Hermann, J.2
Bouchoule, A.3
-
5
-
-
84955025395
-
-
G. Selwyn, J. McKillop, K. Haller, and J. Wu, J. Vac. Sci. Technol. A 8, 1726 (1990).
-
(1990)
J. Vac. Sci. Technol. A
, vol.8
, pp. 1726
-
-
Selwyn, G.1
McKillop, J.2
Haller, K.3
Wu, J.4
-
9
-
-
0028460651
-
-
T. Fukuzava, H. Kawasaki, M. Shiratani, and Y. Watanabe, Jpn. J. Appl. Phys., Part 1 33 (7B), 4212 (1994).
-
(1994)
Jpn. J. Appl. Phys., Part 1
, vol.33
, Issue.7 B
, pp. 4212
-
-
Fukuzava, T.1
Kawasaki, H.2
Shiratani, M.3
Watanabe, Y.4
-
10
-
-
0028462409
-
-
H. Kawasaki, T. Fukuzava, H. Tsuruoka, et al., Jpn. J. Appl. Phys., Part 1 33 (7B), 4198 (1994).
-
(1994)
Jpn. J. Appl. Phys., Part 1
, vol.33
, Issue.7 B
, pp. 4198
-
-
Kawasaki, H.1
Fukuzava, T.2
Tsuruoka, H.3
-
11
-
-
0028416982
-
-
W. Böhme, W. E. Köhler, M. Römheld, et al., IEEE Trans. Plasma Sci. 22, 110 (1994).
-
(1994)
IEEE Trans. Plasma Sci.
, vol.22
, pp. 110
-
-
Böhme, W.1
Köhler, W.E.2
Römheld, M.3
-
13
-
-
0030525442
-
-
Y. Watanabe, M. Shiratani, H. Kawasaki, et al., J. Vac. Sci. Technol. A 14, 540 (1996).
-
(1996)
J. Vac. Sci. Technol. A
, vol.14
, pp. 540
-
-
Watanabe, Y.1
Shiratani, M.2
Kawasaki, H.3
-
15
-
-
0001402789
-
-
A. Bouchoule, L. Boufendi, J. Hermann, et al., Pure Appl. Chem. 68, 1121 (1996).
-
(1996)
Pure Appl. Chem.
, vol.68
, pp. 1121
-
-
Bouchoule, A.1
Boufendi, L.2
Hermann, J.3
-
16
-
-
0032179669
-
-
H. Kawasaki, K. Sakamoto, S. Maeda, et al., Jpn. J. Appl. Phys., Part 1 37 (10), 5757 (1998).
-
(1998)
Jpn. J. Appl. Phys., Part 1
, vol.37
, Issue.10
, pp. 5757
-
-
Kawasaki, H.1
Sakamoto, K.2
Maeda, S.3
-
17
-
-
0001321929
-
-
T. Fukuzava, S. Kushima, Y. Matsuoka, et al., J. Appl. Phys. 86, 3543 (1999).
-
(1999)
J. Appl. Phys.
, vol.86
, pp. 3543
-
-
Fukuzava, T.1
Kushima, S.2
Matsuoka, Y.3
-
18
-
-
0000431794
-
-
K. Koga, Y. Matsuoka, K. Tanaka, et al., Appl. Phys. Lett. 77, 196 (2000).
-
(2000)
Appl. Phys. Lett.
, vol.77
, pp. 196
-
-
Koga, K.1
Matsuoka, Y.2
Tanaka, K.3
-
19
-
-
0033157449
-
-
M. Shiratani, T. Fukuzawa, and Y. Watanabe, Jpn. J. Appl. Phys., Part 1 38 (7B), 4542 (1999).
-
(1999)
Jpn. J. Appl. Phys., Part 1
, vol.38
, Issue.7 B
, pp. 4542
-
-
Shiratani, M.1
Fukuzawa, T.2
Watanabe, Y.3
-
20
-
-
0032179678
-
-
H. Kawasaki, K. Sakamoto, and S. Maeda, Jpn. J. Appl. Phys., Part 2 37 (10B), L1264 (1998).
-
(1998)
Jpn. J. Appl. Phys., Part 2
, vol.37
, Issue.10 B
-
-
Kawasaki, H.1
Sakamoto, K.2
Maeda, S.3
-
21
-
-
0009055899
-
-
H. Kawasaki, J. Kida, K. Sakamoto, et al., J. Appl. Phys. 83, 5665 (1998).
-
(1998)
J. Appl. Phys.
, vol.83
, pp. 5665
-
-
Kawasaki, H.1
Kida, J.2
Sakamoto, K.3
-
28
-
-
0033157823
-
-
Y. Matsuoka, M. Shiratani, T. Fukuzava, et al., Jpn. J. Appl. Phys., Part 1 38 (7B), 4556 (1999).
-
(1999)
Jpn. J. Appl. Phys., Part 1
, vol.38
, Issue.7 B
, pp. 4556
-
-
Matsuoka, Y.1
Shiratani, M.2
Fukuzava, T.3
-
29
-
-
0033872102
-
-
M. Shiratani, S. Maeda, K. Koga, and Y. Watanabe, Jpn. J. Appl. Phys., Part 1 39 (1), 287 (2000).
-
(2000)
Jpn. J. Appl. Phys., Part 1
, vol.39
, Issue.1
, pp. 287
-
-
Shiratani, M.1
Maeda, S.2
Koga, K.3
Watanabe, Y.4
-
31
-
-
33748123982
-
-
M. T. Swihart, S. Nijhawan, M. R. Mahajan, et al., J. Aerosol Sci. 29, 879 (1998).
-
(1998)
J. Aerosol Sci.
, vol.29
, pp. 879
-
-
Swihart, M.T.1
Nijhawan, S.2
Mahajan, M.R.3
-
32
-
-
0005769188
-
-
U. R. Kortshagen, U. V. Bhandarkar, M. T. Swihart, and M. T. Girshick, Pure Appl. Chem. 71, 1871 (1999).
-
(1999)
Pure Appl. Chem.
, vol.71
, pp. 1871
-
-
Kortshagen, U.R.1
Bhandarkar, U.V.2
Swihart, M.T.3
Girshick, M.T.4
-
34
-
-
0034324652
-
-
U. V. Bhandarkar, M. T. Swihart, S. L. Girshick, and U. R. Kortshagen, J. Phys. D: Appl. Phys. 33, 2731 (2000).
-
(2000)
J. Phys. D: Appl. Phys.
, vol.33
, pp. 2731
-
-
Bhandarkar, U.V.1
Swihart, M.T.2
Girshick, S.L.3
Kortshagen, U.R.4
-
39
-
-
0001923022
-
-
[Phys. Usp. 40, 53 (1997)].
-
(1997)
Phys. Usp.
, vol.40
, pp. 53
-
-
-
41
-
-
0008570395
-
-
H. U. Keller, J. Blum, B. Donn, et al., Adv. Space Res. 13 (7), 73 (1993).
-
(1993)
Adv. Space Res.
, vol.13
, Issue.7
, pp. 73
-
-
Keller, H.U.1
Blum, J.2
Donn, B.3
-
44
-
-
0343042871
-
-
Ed. by P. K. Shukla, D. A. Mendis, and T. Desai (World Sci., Singapore)
-
K. Watanabe, K. Nishimura, and T. Sato, in Advances in Dusty Plasmas, Ed. by P. K. Shukla, D. A. Mendis, and T. Desai (World Sci., Singapore, 1998), p. 394.
-
(1998)
Advances in Dusty Plasmas
, pp. 394
-
-
Watanabe, K.1
Nishimura, K.2
Sato, T.3
-
46
-
-
33747330387
-
-
[JETP 94, 1106 (2002)].
-
(2002)
JETP
, vol.94
, pp. 1106
-
-
-
50
-
-
0142257076
-
-
[JETP 96, 444 (2003)].
-
(2003)
JETP
, vol.96
, pp. 444
-
-
|