Experimental characterization of collapse-mode CMUT operation

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 53, Issue 8, 2006, Pages 1513-1523

  Oralkan, Ömer ^a,b   Bayram, Baris ^a,b   Yaralioglu, Goksen G ^a,b   Sanli Ergun, A ^a,b   Kupnik, Mario ^b   Yeh, David T ^a,b   Wygant, Ira O ^a,b   Khuri Yakub, Butrus T ^a,b  

^a IEEE   (United States)

^b STANFORD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALTERNATING CURRENT (AC) DISPLACEMENT; BOTTOM ELECTRODES; CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCERS (CMUT); CIRCULAR MEMBRANE;

AC MACHINERY; AMPLIFIERS (ELECTRONIC); CAPACITANCE; DC MACHINERY; ELECTRIC POTENTIAL; ELECTRODEPOSITION; MICROMACHINING; SILICON NITRIDE;

ULTRASONIC TRANSDUCERS;

EID: 33747426302     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/TUFFC.2006.1665109     Document Type: Article

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