Noncontact measurement of charge induced voltage shift in capacitive MEM-switches

IEEE Microwave and Wireless Components Letters

Volumn 13, Issue 9, 2003, Pages 367-369

  Reid, J Robert ^a   Webster, Richard T ^a   Starman, LaVern A ^a  

^a AIR FORCE RESEARCH LABORATORY   (United States)

Author keywords

Capacitor; Dielectric charging; MEMS; Micromachining; Microwave; Millimeterwave; Reliability; Switches

Indexed keywords

BRIDGE CIRCUITS; CAPACITANCE MEASUREMENT; DIELECTRIC DEVICES; ELECTRIC CHARGE MEASUREMENT; MICROELECTROMECHANICAL DEVICES; MODULATION; SWITCHING CIRCUITS; VOLTAGE MEASUREMENT;

CAPACITIVE SWITCH; CHARGE INDUCED VOLTAGE SHIFT; DIELECTRIC CHARGING; MICROELECTROMECHANICAL SWITCH; NONCONTACT MEASUREMENT;

MILLIMETER WAVE DEVICES;

EID: 0141988710     PISSN: 15311309     EISSN: None     Source Type: Journal    
DOI: 10.1109/LMWC.2003.817124     Document Type: Letter

References (5)

1. C. Goldsmith, J. Ehmke, A. Malczewski, B. Pillans, S. Eshelman, Z. Yao, J. Brank, and M. Eberly, "Lifetime characterization of capacitive RF MEMS switches," in 2001 IEEE MTT-S Symp. Dig., June 2001, pp. 227-230.
2. J. R. Reid, "Capacitive switch reliability issues," in Proc. GOMAC 2002 Dig. Papers, Mar. 2002, pp. 48-51.
3. E. Chan, K. Garikipati, and R. Dutton, "Characterization of contact electromechanics through capacitance-voltage measurements and simulations," J. Microelect. Syst., vol. 8, pp. 208-217, June 1999.
4. J. R. Reid, "Simulation and measurement of dielectric charging in electrostatically actuated capacitive microwave switches," in Proc. Modeling Simulation of Microsystems, San Juan, PR, Apr. 2002, pp. 250-253.
5. J. R. Reid and R. T. Webster, "Measurements of charging in capacitive microelectromechanical switches," Electron. Lett., vol. 38, no. 24, Nov. 2002.