Adhesion and pull-off forces for polysilicon MEMS surfaces using the sub-boundary lubrication model

Journal of Tribology

Volumn 125, Issue 1, 2003, Pages 193-199

  Suh, Allison Y ^a   Polycarpou, Andreas A ^a  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; ELASTICITY; INTERFACES (MATERIALS); MATHEMATICAL MODELS; PLASTICITY; STICTION; SURFACE ROUGHNESS; WEAR OF MATERIALS;

INTERMOLECULAR FORCES;

POLYSILICON;

ADHESION; BOUNDARY LUBRICATION; FILM THICKNESS; LUBRICATION; MODEL; WEAR PREVENTION;

EID: 0037570811     PISSN: 07424787     EISSN: None     Source Type: Journal    
DOI: 10.1115/1.1506313     Document Type: Article

References (21)

1. Tian, H., and Matsudaira, T., 1993, "The Role of Relative Humidity, Surface Roughness and Liquid Buildup on Static Friction Behavior of the Head/Disk Interface," ASME J. Tribol., 115, pp. 28-35.
2. Kaneko, R., 1991, "Microtribology Related to MEMS-Concept, Measurement, Applications," IEEE, Proceedings of Micro Electro Mechanical Systems, 91, pp. 1-8.
3. Komvopoulos, K., 1996, "Surface Engineering and Microtribology for Micro-electromechanical Systems," Wear, 200 (1-2 , pp. 305-327.
4. Maboudian, R., and Howe, R. T., 1997, "Critical Review: Adhesion in Surface Micro electro mechanical Structures," J. Vac. Sci. Technol. B, 15(1), pp. 1-20.
5. Torii, A., Sasaki, M., Hane, K., and Okuma, S., 1993, "Adhesive Force on the Microstructures Measured by the Atomic Force Microscope," MEMS '93, Proc. An Investigation of Micro Structures, Sensors Actuators, Machines and Systems, IEEE, pp. 111-116.
6. Jennings, J. M., and Phinney, L. M., 2000, "Effects of Temperature on Stiction in MEMS Structures," Proc. of SPIE: MEMS Reliability for Critical Applications, 4180(6), Russell A. Lawton, ed., pp. 66-75.
7. nd ed., San Diego.
8. Stanley, H. M., Etsion, I., and Bogy, D. B., 1990, "Adhesion of Contacting Rough Surfaces in the Presence of Sub-Boundary Lubrication," ASME J. Tribol., 112, pp. 98-104.
9. Greenwood, J. A., and Williamson, J. P. B., 1966, "Contact of Nominally Flat Surfaces," Proc. R. Soc. London, Ser. A, 295, pp. 300-319.
10. Polycarpou, A. A., and Etsion, I., 1998, "Static Friction of Contacting Real Surfaces in the Presence of Sub-Boundary Lubrication," ASME J. Tribol., 120, pp. 296-303.
11. Polycarpou, A. A., and Etsion, I., 1998, "Comparison of the Static Friction Sub-Boundary Lubrication Model with Experimental Measurements on Thin Film Disks," STLE Tribol. Trans., 41(2), pp. 217-224.
12. th Annual Reliability Physics Symposium Proceedings, pp. 26-35.
13. Polycarpou, A. A., 2002, "Modeling Adhesive Forces for Ultra Low Flying Head Disk Interfaces," in Nanotribology: Critical Assessment and Research Needs, S. M. Hsu, ed., Kluwer Academic Publishers.
14. Ando, Y., 2000, "Wear Tests and Pull-Off Force Measurements of Single Asperities by Using Parallel Leaf Springs Installed on an Atomic Force Microscope," ASME J. Tribol., 122, pp. 639-645.
15. Polycarpou, A. A., and Suh, A., 2001, "A Model for Adhesive Forces in Miniature Systems," in Fundamentals of Tribology and Bridging the Gap Between Macro-and Micro/Nanoscales, B. Bhushan, ed., Kluwer Academic Publishers.
16. Chang, W. R., Etsion, I., and Bogy, D. B., 1987, "An Elastic-Plastic Model for the Contact of Rough Surfaces," ASME J. Tribol., 109, pp. 257-263.
17. Johnson, K. L., Kendall, K., and Roberts, A. D., 1971, "Surface Energy and the Contact of Elastic Solids," Proc. R. Soc. London, Ser. A, 324, pp. 301-313.
18. Derjaguin, B. V., Muller, V. M., and Toporov, Y. P., 1975, "Effect of Contact Deformations on the Adhesion of Particles," J. Colloid Interface Sci., 53, pp. 314-326.
19. McCool, J. I., 1987, "Relating Profile Instrument Measurements of the Functional Performance of Rough Surfaces," ASME J. Tribol., 109, pp. 264-279.
20. nd ed., CRC Press.
21. th ed., Butterworth and Co.