A cMUT linear array used as echographic probe: Fabrication, characterization, and images

Proceedings - IEEE Ultrasonics Symposium

Volumn 1, Issue , 2004, Pages 395-398

  Caliano, G ^a   Carotenuto, R ^b   Cianci, E ^c   Foglietti, V ^c   Caronti, A ^a   Pappalardo, M ^a  

^a ROMA TRE UNIVERSITY   (Italy)

^b UNIVERSITY MEDITERRANEA OF REGGIO CALABRIA   (Italy)

^c IFN CNR   (Italy)

Author keywords

Capacitive transducer array; CMUT; Echographic imaging; Probe; Surface micromachining

Indexed keywords

CAPACITATIVE TRANSDUCER ARRAY; CMUT; ECHOGRAPHIC IMAGING; PROBE; SURFACE MICROMACHINING;

BIOLOGICAL ORGANS; ECHOCARDIOGRAPHY; ELECTRIC FIELDS; IMAGE SEGMENTATION; MEDICAL IMAGING; MICROMACHINING; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SURFACE PROPERTIES; ULTRASONIC TRANSDUCERS;

ARRAYS;

EID: 21644464015     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)

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6. D. M. Mills and L. S. Smith, "Real-Time In-Vivo Imaging with Capacitive Micromachined Ultrasound Transducer (cMUT) Linear Arrays", IEEE Ultras. Symp., Honolulu, USA, 2003.