Synthesis of c-BN films by using a low-pressure inductively coupled BF3-He-N2-H2 plasma

Diamond and Related Materials

Volumn 15, Issue 9, 2006, Pages 1357-1361

  Yamamoto, H ^b   Matsumoto, S ^a   Okada, K ^a   Yu, J ^a   Hirakuri, K ^b  

^a NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

^b TOKYO DENKI UNIVERSITY   (Japan)

Author keywords

Cubic boron nitride (c BN); Plasma CVD

Indexed keywords

COATINGS; HELIUM; HYDROGEN; INDUCTIVELY COUPLED PLASMA; MIXTURES; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SUBSTRATES; SYNTHESIS (CHEMICAL); THERMAL EFFECTS; THIN FILMS;

BOMBARDING ENERGY; CUBIC BORON NITRIDE (C-BN); PLASMA CVD; SUBSTRATE TEMPERATURE;

CUBIC BORON NITRIDE;

EID: 33746633909     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2005.10.007     Document Type: Article

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