Computer simulations of surface analysis using ion beams

Progress in Surface Science

Volumn 81, Issue 6-7, 2006, Pages 247-335

  Ignatova, V ^a   Karpuzov, D ^b   Chakarov, I ^c   Katardjiev, I ^d  

^a BELGIAN NUCLEAR RESEARCH CENTRE   (Belgium)

^b UNIVERSITY OF ALBERTA   (Canada)

^c Silvaco Data Systems Inc   (United States)

^d UPPSALA UNIVERSITY   (Sweden)

Author keywords

Computer simulation; Ion beam; Ion scattering; Sputtering; Surface analysis

Indexed keywords

COMPUTER SIMULATION; ELECTRON BEAMS; IONS; MOLECULAR DYNAMICS; MONTE CARLO METHODS; PHONONS; SCATTERING; SPUTTERING; X RAYS;

ION SCATTERING; MULTIELEMENTAL TARGETS; SPUTTER YIELD AMPLIFICATION EFFECTS; SURFACE ANALYSIS;

ION BEAMS;

EID: 33746210027     PISSN: 00796816     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.progsurf.2006.03.003     Document Type: Review

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