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Thin Solid Films
Volumn 272, Issue 2, 1996, Pages 289-309
Fundamental aspects of SNMS for thin film characterization: Experimental studies and computer simulations
Author keywords

Computer simulation; Depth profiling; Laser irradiation; Sputtering
Indexed keywords

CHARACTERIZATION; COMPUTER SIMULATION; IONIZATION; IRRADIATION; LASER APPLICATIONS; SECONDARY ION MASS SPECTROMETRY; SPUTTERING; SURFACES; THIN FILMS;
EID: 0029735449     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/0040-6090(95)06954-2     Document Type: Article
Times cited : (23)
References (191)
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