Modeling, design, fabrication and measurement of a single layer polysilicon micromirror with initial curvature compensation

Sensors and Actuators, A: Physical

Volumn 78, Issue 1, 1999, Pages 8-17

  Min, Young Hoon ^a   Kim, Yong Kweon ^a  

^a Seoul National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; HELIUM NEON LASERS; LIGHT MODULATION; MASKS; MATHEMATICAL MODELS; METALLIZING; PHASE MODULATION; POLYCRYSTALLINE MATERIALS; RESIDUAL STRESSES; SILICON; STRESS ANALYSIS;

MICROMIRRORS;

MIRRORS;

EID: 0342592214     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(99)00198-3     Document Type: Article

References (11)

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