Fabrication and characterizations of a monolithic PZT microstage

Microsystem Technologies

Volumn 12, Issue 9, 2006, Pages 883-890

  Xu, Hegen ^a   Ono, Takahito ^a   Zhang, De Yuan ^b   Esashi, Masayoshi ^a  

^a TOHOKU UNIVERSITY   (Japan)

^b BEIHANG UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

DEGREES OF FREEDOM (MECHANICS); ELECTROPLATING; FINITE ELEMENT METHOD; LITHOGRAPHY; NATURAL FREQUENCIES; POSITION MEASUREMENT;

DICING; DISPLACEMENT AMPLIFICATION; HIGH-PRECISION POSITIONING; LASER MACHINING;

LEAD COMPOUNDS;

EID: 33745224971     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-006-0206-z     Document Type: Article

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