Electrostatic actuators with long range translation

TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers

Volumn 1, Issue , 2003, Pages 356-359

  Shutov, M V ^a   Howard, D L ^a   Sandoz, E E ^a   Smith, R L ^a   Collins, S D ^a  

^a Davis   (United States)

Author keywords

Capacitors; Clamps; Displacement control; Electrostatic actuators; Fabrication; Mirrors; Size control; Springs; Voltage; Wiring

Indexed keywords

ACTUATORS; CAPACITORS; CLAMPING DEVICES; DISPLACEMENT CONTROL; ELECTRIC CONNECTORS; ELECTRIC POTENTIAL; ELECTRIC WIRING; ELECTROSTATICS; FABRICATION; MICROSYSTEMS; MIRRORS; SOLID-STATE SENSORS; SPRINGS (COMPONENTS); TRANSDUCERS;

CONTROL DIRECTIONS; ELECTRICAL CONNECTION; ELECTRICAL WIRING; ELECTROSTATIC CLAMPS; NANOMETER RESOLUTIONS; OSCILLATION AMPLITUDE; SERIES CAPACITORS; SIZE CONTROL;

ELECTROSTATIC ACTUATORS;

EID: 33745135673     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2003.1215327     Document Type: Conference Paper

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