Fabrication of high-accuracy microtranslation table for near-field optical data storage actuated by inverted scratch-drive actuators

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 42, Issue 6 B, 2003, Pages 4074-4078

  Kanamori, Yoshiaki ^a   Yahagi, Hiroto ^a   Ono, Takahito ^a   Sasaki, Minoru ^a   Hane, Kazuhiro ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

Data storage; Micromachining; Microtranslation table; Near field; Scratch drive actuators

Indexed keywords

ACTUATORS; ELECTRIC FIELDS; ELECTRODES; MICROMACHINING; SEMICONDUCTING SILICON;

MICROTRANSLATION TABLE;

OPTICAL DATA STORAGE;

EID: 0042362154     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.42.4074     Document Type: Conference Paper

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