Magnetically-driven bi-directional optical microscanner

Journal of Micromechanics and Microengineering

Volumn 13, Issue 3, 2003, Pages 383-389

  Cho, Hyoung J ^a   Ahn, Chong H ^b  

^a University of Central Florida   (United States)

^b University of Cincinnati   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CALCULATIONS; ELECTROMAGNETS; FINITE ELEMENT METHOD; MAGNETIC PROPERTIES; MICROMACHINING; MIRRORS; OPTICAL DESIGN; PERMANENT MAGNETS; SCANNING;

BI-DIRECTIONAL OPTICAL MICROSCANNER; BI-DIRECTIONAL SCANNING; UNI-DIRECTIONAL SCANNER;

OPTICAL DEVICES;

EID: 0038015827     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/13/3/306     Document Type: Article

References (17)

1. Miyajima H, Asaoka N, Arima M, Minamoto Y, Murakami K, Tokuda K and Matsumoto K 1999 An electromagnetic optical scanner with polyimide-based hinges Transducers '99, Digest of Technical Papers (Sendai, Japan) pp 372-5
2. Ferreira L O S and Moehlecke S 1999 A silicon micromechanical galvanometric scanner Sensors Actuators 73 252-60
3. Cho H J, Yan J, Kowel S T, Beyette F R Jr. and Ahn C H 2000 A scanning silicon micromirror using a bi-directionally movable magnetic microactuator Proc. SPIE (Santa Clara, CA, 2000) vol 4178 pp 106-15
4. Judy J W 2001 Microelectromechanical systems (MEMS): fabrication, design and applications Smart Mater. Struct. 10 1115-1134
5. Guckel H 1998 Progress in magnetic microactuators Microsyst. Technol. 5 59-61
6. Conant R A, Haeglin P M, Krishnamoorthy U, Hart M, Solgaard O, Lau K Y and Muller R S 2000 A raster-scanning full-motion video display using polysilicon micromachined mirrors Sensors Actuators 83 291-6
7. Urey H, Wine D W and Osborn T D 2000 Optical performance requirements for MEMS-scanner based microdisplays Proc. SPIE (Santa Clara, CA, 2000) vol 4178 176-85
8. Higdon A and Stiles W B 1962 Engineering Mechanics Vector Edition: Statics and Dynamics (Englewood Cliffs, NJ: Prentice-Hall)
9. Roark R J and Young W C 1975 Formulas for Stress and Strain (New York: McGraw-Hill)
10. Peterson K E 1980 Silicon torsional scanning mirror IBM J. Res. Dev. 24 631-7
11. Camon H, Larnaudie F, Rivoirard F and Jammes B 1999 Analytical simulation of a 1D single crystal silicon electrostatic micromirror Technical Proc. 1999 Int. Conf. on Modeling and Simulation of Microsystems (San Juan, Puerto Rico)
12. Iyer S, Zhou Y and Mukherjee T 1999 Analytical modeling of cross-axis coupling in micromechanical springs Technical Proc. 1999 Int. Conf. on Modeling and Simulation of Microsystems (San Juan, Puerto Rico)
13. Cheng H-M, Ewe M T S, Chiu G T-C and Bashir R 2001 Modeling and control of piezoelectric cantilever beam micromirror and microlaser arrays to reduce image banding in electrophotographic processes J. Micromech. Microeng. 11 487-98
14. Pan F, Kubby J, Peeters E, Tran A T and Mukherjee S 1998 Squeeze film damping effect in the dynamic response of a MEMS torsion mirror J. Micromech. Microeng. 8 200-8
15. Zhang X M, Chau F S, Quan C, Lam Y L and Liu A Q 2001 A study of the static characteristics of a torsional micromirror Sensors Actuators A 90 73-81
16. Gollee R, Roschke Th and Gerlach G 1999 A finite element method based dynamic analysis of a long-stroke linear actuator J. Magn. Mater. 196-197 943-5
17. Cho H J and Ahn C H 2002 Microscale resin-bonded permanent magnets for magnetic MEMS applications Proc. 47th Int. Conf. on Magnetism and Magnetic Materials (Tampa, FL 2002) p 422