Precise position control of a linear stage integrated with an inchworm type actuator

Proceedings of the SICE Annual Conference

Volumn , Issue , 2004, Pages 955-959

  Moon, Chanwoo ^a   Lee, Sungho ^a   Chung, J K ^a   Sung, Hagyoeng ^a  

^a NONE   (South Korea)

Author keywords

I Q heterodyne interferometer; Inchworm type motor; Stage

Indexed keywords

FIBER OPTICS; HYSTERESIS; INTERFEROMETERS; MATHEMATICAL MODELS; MICROELECTROMECHANICAL DEVICES; MOTORS; PIEZOELECTRIC DEVICES; POSITION CONTROL; ROBUSTNESS (CONTROL SYSTEMS); SEMICONDUCTOR MATERIALS; SERVOMECHANISMS;

I/Q HETERODYNE INTERFEROMETERS; INCHWORM TYPE MOTOR; PIEZO ACTUATORS; STAGE;

ACTUATORS;

EID: 12744274796     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)

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