Absolute micro-encoder using image obtained by ball lens assembled inside wafer

Journal of Optics A: Pure and Applied Optics

Volumn 8, Issue 7, 2006, Pages

  Sasaki, Minoru ^a   Nakai, Fuki ^a   Hane, Kazuhiro ^a   Yokomizo, Kanji ^b   Hori, Kazuhito ^b  

^a TOHOKU UNIVERSITY   (Japan)

^b SONY CORPORATION   (Japan)

Author keywords

Absolute micro encoder; Assembly; Ball lens; MEMS; Optoelectronic integration

Indexed keywords

MICROELECTROMECHANICAL DEVICES; MICROOPTICS; OPTICAL INSTRUMENT LENSES; OPTOELECTRONIC DEVICES; SILICON ON INSULATOR TECHNOLOGY; SILICON WAFERS;

ABSOLUTE MICRO-ENCODER; BALL LENS; OPTOELECTRONIC INTEGRATION;

IMAGE CODING;

EID: 33745188876     PISSN: 14644258     EISSN: 17413567     Source Type: Journal    
DOI: 10.1088/1464-4258/8/7/S16     Document Type: Article

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