Micro-encoder based on higher-order diffracted light interference

Journal of Micromechanics and Microengineering

Volumn 15, Issue 8, 2005, Pages 1459-1465

  Higurashi, Eiji ^a   Sawada, Renshi ^b  

^a UNIVERSITY OF TOKYO   (Japan)

^b KYUSHU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFRACTION GRATINGS; DISTRIBUTED FEEDBACK LASERS; ELECTROMAGNETIC WAVE DIFFRACTION; MICROMACHINING; POLYIMIDES; SEMICONDUCTOR LASERS; SILICON; WAVEGUIDES;

DISPLACEMENT DETECTION; MICRO-ENCODERS; MICRO-GRATINGS; POLYIMIDE WAVEGUIDES;

LIGHT INTERFERENCE;

EID: 22544435558     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/15/8/012     Document Type: Article

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