Optical micro encoder with sub-micron resolution using a VCSEL

Sensors and Actuators, A: Physical

Volumn 71, Issue 3, 1998, Pages 213-218

  Miyajima, Hiroshi ^a   Yamamoto, Eiji ^a   Yanagisawa, Kazuhisa ^a  

^a OLYMPUS CORPORATION   (Japan)

Author keywords

Directional sensing; Linear stage; Microlenses; Optical micro encoder; Packaging; VCSEL

Indexed keywords

CODE CONVERTERS; INTEGRATED OPTOELECTRONICS; INTERPOLATION; LENSES; MICROSENSORS; MONOLITHIC INTEGRATED CIRCUITS; SEMICONDUCTOR LASERS; SIGNAL ENCODING;

DIRECTIONAL SENSING; MICROLENSES; OPTICAL MICROENCODERS; VERTICAL CAVITY SURFACE EMITTING LASERS (VCSEL);

OPTICAL SENSORS;

EID: 0032319155     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(98)00188-5     Document Type: Article

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