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Volumn 38, Issue 33, 1999, Pages 6866-6873

Monolithic-integrated microlaser encoder

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EID: 0009129496     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.38.006866     Document Type: Article
Times cited : (18)

References (14)
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    • Shimada, J.1    Ohguchi, O.2    Sawada, R.3
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    • Polyimide derived from 2,2'-bis(Trifluoromethyl)-4,4'-diaminobiphenyl. I. Synthesis and characterization of polyimides prepared with 2,2'-bis(3,4-dicarboxyphenyl) hexafluoropane dianhydride or pyromellitic dianhydride
    • T. Matsuura, N. Yamada, S. Nishi, and N. Yamada, “Polyimide derived from 2,2'-bis(trifluoromethyl)-4,4'-diaminobiphenyl. I. Synthesis and characterization of polyimides prepared with 2,2'-bis(3,4-dicarboxyphenyl) hexafluoropane dianhydride or pyromellitic dianhydride,” Macromolecules 24, 5001-5005 (1991).
    • (1991) Macromolecules , vol.24 , pp. 5001-5005
    • Matsuura, T.1    Yamada, N.2    Nishi, S.3    Yamada, N.4
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    • Preparation of a novel silicone-based positive photoresist and its application to an image reversal process
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    • A. Furuya, F. Shimokawa, T. Matsuura, and R. Sawada, “Fabrication of fluorinated polyimide microgrids using magnetically controlled reactive ion etching (MC-RIE) and their applications to an ion drag integrated micropump,” J. Micro-mech. Microeng. 6, 310-319 (1996).
    • (1996) J. Micro-Mech. Microeng. , vol.6 , pp. 310-319
    • Furuya, A.1    Shimokawa, F.2    Matsuura, T.3    Sawada, R.4
  • 13
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    • Dielectric surface-relief gratings with high diffraction efficiency
    • K. Yokomori, “Dielectric surface-relief gratings with high diffraction efficiency,” Appl. Opt. 23, 2303-2310 (1984).
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    • Soot bonding process and its application to Si dielectric isolation
    • R. Sawada, J. Watanabe, H. Nakada, and K. Koyabu, “Soot bonding process and its application to Si dielectric isolation,” J. Electrochem. Soc. 138, 184-189 (1991)
    • (1991) J. Electrochem. Soc. , vol.138 , pp. 184-189
    • Sawada, R.1    Watanabe, J.2    Nakada, H.3    Koyabu, K.4


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.