Transmission-type position sensor for the straightness measurement of a large structure

Journal of Micromechanics and Microengineering

Volumn 9, Issue 4, 1999, Pages 429-433

  Sasaki, Minoru ^a   Takebe, Hitoshi ^a   Hane, Kazuhiro ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

LASER BEAMS; LIGHT ABSORPTION; LIGHT TRANSMISSION; PHOTODIODES; PHOTONS; POSITION MEASUREMENT; PRECISION ENGINEERING; SILICON; STRUCTURAL ANALYSIS; WAVEFRONTS;

STRAIGHTNESS MEASUREMENT;

MICROSENSORS;

EID: 0033319003     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/9/4/321     Document Type: Article

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