Integration of grating-image-type encoder using Si micromachining

Sensors and Actuators, A: Physical

Volumn 97-98, Issue , 2002, Pages 139-146

  Hane, K ^a   Endo, T ^a   Ishimori, M ^a   Ito, Y ^a   Sasaki, M ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

Displacement sensing; Encoder; Grating; Optical sensor; Si micromachining

Indexed keywords

DIFFRACTION GRATINGS; LIGHT EMITTING DIODES; OPTICAL SENSORS; OPTICAL TRANSFER FUNCTION; PHOTODETECTORS; PHOTODIODES;

DISPLACEMENT SENSING; GRATING-IMAGE-TYPE ENCODER;

MICROMACHINING;

EID: 0036544328     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(01)00800-7     Document Type: Conference Paper

References (9)

1. Long-lift micro-laser encoder
2. Optical encoder using a slit-width-modulated grating
3. Pitch-modulated phase grating and its application to displacement encoder
4. Analysis of grating imaging and its application to displacement metrology
5. Magnified grating images used in displacement sensing
6. Imaging with rectangular transmission gratings
7. A compact optical encoder with micromachined photodetector