Multiple-height Microstructures Fabricated by ICP-RIE and Embedded Masking Layers

IEEJ Transactions on Sensors and Micromachines

Volumn 120, Issue 11, 2000, Pages 493-497

  Mita, Makoto ^a   Mita, Yoshio ^a   Toshiyoshi, Hiroshi ^a   Fujita, Hiroyuki ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

HARMS; ICP RIE; MEMS; multi height structure

Indexed keywords

EID: 85010155643     PISSN: 13418939     EISSN: 13475525     Source Type: Journal    
DOI: 10.1541/ieejsmas.120.493     Document Type: Article

References (11)

1. H. Guckel, et al. “A First Functional Current Excited Planar Rotational Magnetic Micromotor,” Tech. Digest of IEEE Micro Electro Mechanical Systems (MEMS93), 1993, p. 7
2. A. Mehra, et al. “COMBUSTION TEST IN THE 6-WAFER STATIC STRUCTURE OF A MICRO GAS TURBINE ENGINE”, Proc. Transdusers'99, Sendai, Japan Jun. 7-10, (1999), pp. 1224-1227
3. A. A. Yasseen, J. Mitchell, T. Streit, D. A. Smith, M. Mehregany, “A Rotary Electrostatic Micromotor 1x8 Optical Switch,” Tech. Digest of IEEE Micro Electro Mechanical Systems (MEMS98), Heidelberg, Germany, Jan. 25-29, 1998, pp. 116-120.
4. J. -J. Choi, R. Toda, K. Minami, M. Esashi, “Silicon Angular Resonance Gyroscope by Deep ICPRIE and XeF2 Gas Etching,” Tech. Digest of IEEE Micro Electro Mechanical Systems (MEMS98), Heidelberg, Germany, Jan. 25-29, 1998, pp. 322-327.
5. M. Abe, M. Esashi, Sensor, Micromachine and application system synposium, Japan, 1998, p.77.
6. M. Mita, Y. Mita, H. Toshiyoshi and H. Fujita, “Delay-Masking Proc.ess for Silicon Three-Dimensional Bulk Structures,” Trans. IEE Japan, Vol. 119-E, May. 1999, pp. 310311.
7. Jessica Melin, Peter Enoksson, Thierry Corman, Goran Stemme, “A Low Pressure Encapsulated DRIE Resonant Pressure Sensor Electrically Excited and Detected Using 'Burst' Tech.nology,” Proc.eedings of Micromechanics Europe (MME '99), Gif-sur-Yvette, France, Sep. 27-28, 1999, pp. 97-100
8. Vassil Ianev, Norbert Schwesinger, “Multistep Deep Structuring of Silicon Using Wet Anisotropic Etching and Dry Etching Proc.esses for Micromechanical Purposes,” Proc.eedings of Micromechanics Europe (MME '99), Gif-sur-Yvette, France, Sep. 27-28, 1999 pp. 160-163
9. S. Kamisuki, M. Fujii, T. Takekoshi, C. Tezuka and M. Atobe, “A HIGH RESOLUTION, ELECTROSTATICALLY-DRIVEN COMMERCIAL INKJET HEAD,” Tech. Digest of IEEE Micro Electro Mechanical Systems (MEMS 2000), Miyazaki, Japan, Jan. 23-27, 2000 pp. 793-798.
10. By modifying the default Proc.essing recipe supplied by the DRIE manufacturer, Plasma-Therm, Inc.
11. Y. Mita, M. Mita, and H. Fujtia, “Embedded-Mask-Methods for mm-scale multi-layer vertical/slanted Si structures,” Tech. Digest of IEEE Micro Electro Mechanical Systems (MEMS 2000), Miyazaki, Japan, Jan. 23-27, 2000 pp. 300-305.