Optoelectromechanical switch array with passively aligned free-space optical components

Journal of Lightwave Technology

Volumn 21, Issue 3, 2003, Pages 664-671

  Ruzzu, Antonio C M ^a,b   Haller, Dirk ^c   Mohr, Jürgen A ^b   Wallrabe, Ulrike ^b  

^a KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

^b ABB CORPORATE RESEARCH   (Germany)

^c NONE

Author keywords

Electrostatic motor; LIGA; Micro mirror; Microoptical bench; Optical switch array; Wobble motor

Indexed keywords

BANDWIDTH; ELECTRIC MOTORS; ELECTROSTATICS; MICROOPTICS; MIRRORS;

MICRO MIRRORS;

OPTICAL SWITCHES;

EID: 0037617504     PISSN: 07338724     EISSN: None     Source Type: Journal    
DOI: 10.1109/JLT.2003.809579     Document Type: Conference Paper

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