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Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 43, Issue 6 B, 2004, Pages 3892-3895

Characterization of bi-stable micromechanism based on buckle spring and electrothermal V-beam actuators

(3) Chen, Wen Chih a Wu, Chia Yu a Lee, Chengkuo a

a ASIA PACIFIC MICROSYSTEMS INC (Taiwan)

Author keywords

Electrothermal actuator; Latch; MEMS; Optical switch

Indexed keywords

BUCKLE SPRING; REFLECTIVE MIRRORS; RESONANCE MODES; V-BEAM ACTUATORS;

ACTUATORS; COMPOSITE MICROMECHANICS; ELECTRIC POWER DISTRIBUTION; ENERGY UTILIZATION; MICROELECTROMECHANICAL DEVICES; MIRRORS; REFLECTION; SWITCHING SYSTEMS; TEMPERATURE DISTRIBUTION; THERMAL EXPANSION;

BUCKLING;

EID: 4444330872 PISSN: 00214922 EISSN: None Source Type: Journal
DOI: 10.1143/JJAP.43.3892 Document Type: Conference Paper

Times cited : (2)

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