Fabrication of device nanostructures using supercritical fluids

MRS Bulletin

Volumn 30, Issue 12, 2005, Pages 967-975

  O'Neil, Adam ^a   Watkins, James J ^a  

^a NONE

Author keywords

Block copolymer; Mesoporous; Metal deposition; Nanoscale; Polymer; Supercritical fluid

Indexed keywords

BLOCK COPOLYMERS; CARBON DIOXIDE; CLEANING; DEPOSITION; ETCHING; NANOSTRUCTURED MATERIALS; SOLUTIONS; SURFACE TENSION;

MESOPOROUS; METAL DEPOSITION; NANOSCALE; NEXT-GENERATION DEVICE FABRICATION;

SUPERCRITICAL FLUIDS;

EID: 33744462641     PISSN: 08837694     EISSN: None     Source Type: Journal    
DOI: 10.1557/mrs2005.250     Document Type: Article

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