Probing the composition of Ge dots and Si/Si1-xGex island superlattices

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 24, Issue 3, 2006, Pages 663-667

  Baribeau, J M ^a   Wu, X ^a   Lockwood, D J ^a  

^a NATIONAL RESEARCH COUNCIL CANADA   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; GERMANIUM; MOLECULAR BEAM EPITAXY; RAMAN SCATTERING; SILICON COMPOUNDS; SUPERLATTICES; TRANSMISSION ELECTRON MICROSCOPY; ULTRAHIGH VACUUM; X RAY DIFFRACTION; X RAY SPECTROSCOPY;

CORROBORATED; ISLAND SUPERLATTICES; PYRAMID SHAPED DOTS; SUBSTRATE INTERFACE;

SEMICONDUCTOR QUANTUM DOTS;

EID: 33646574996     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2186658     Document Type: Article

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